Abstract:This paper presents characterization and compensation of the thermal bias drift of a MEMS accelerometer whose effective stiffness is electrostatically tuned to a low value with the help of the single-sided parallel plates (SSPPs) capacitors. A temperature drift model for the proposed accelerometer is built and the temperature effect on the mechanical stiffness and the circuit gains is characterized. The characterization reveals that the variations of the feedforward coefficient including the mechanical stiffness and the readout gain due to the temperature change play a significant role in the bias drift of output of the proposed closed-loop accelerometer. On the other hand, the variations of both feedback gain and tuning gain as a function of temperature are one-order-of-magnitude less than that of the feedforward coefficient. To calibrate the feedforward coefficient, an excitation signal as a form of AC reference displacement is introduced to drive the proof mass and the readout response is demodulated to calibrate the variance of the feedforward coefficient correspondingly. An open-loop compensation scheme for the temperature-induced bias drift using the variance of the calibrated response is proposed accordingly. Alternatively, the calibrated response can be controlled to a preset value by a new proportion integral derivative (PID) controller by the adjustment of the SSPP tuning voltage. The output of the PID controller is used for the calibration of the introduced bias from the electrostatic tuning force. Therefore, a closed-loop compensation of the thermal bias drift is achieved by remaining the feedforward coefficient while eliminating the calibrated bias. Experiments under a temperature cooling process and different tuning voltages are carried out to verify two proposed compensation schemes. The temperature drift coefficients (TDCs) of both compensated outputs exhibit at least one-order-of-magnitude reduction in response to the temperature change. When the effective stiffness of the accelerometer is tuned to about 4.19 N m(-1), the TDC of the compensated output using the proposed open-loop or closed-loop compensation schemes is reduced to about 0.1136 or 0.0391 mg degrees C-1, respectively and meanwhile, the Allan bias instability is slightly increased to 48.63 or 56.14 mu g, respectively.

A MEMS Resonant Accelerometer with High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation

A Stiffness-Tunable MEMS Accelerometer

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

A MEMS Resonant Accelerometer with Sensitivity Enhancement and Adjustment Mechanisms

A Stiffness-tunable MEMS Accelerometer with In-operation Drift Compensation

Characterization and Compensation of Thermal Bias Drift of a Stiffness-Tunable MEMS Accelerometer

A Real-Time Temperature Compensation Algorithm for a Force-Rebalanced MEMS Capacitive Accelerometer Based on Resonant Frequency.

A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation

A New Type of MEMS Accelerometer with Up-Tuning Structure

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Electrostatic Charge Sensor Based on Micro Resonator with Sensing Scheme of Effective Stiffness Perturbation

A self-centering and stiffness-controlled MEMS accelerometer

Design and experiment of push-pull MEMS Resonant Accelerometers

A Mems Piezoelectric In-Plane Resonant Accelerometer With Two-Stage Micro-Leverage Mechanism

Structural Design and Testing of a Micromechanical Resonant Accelerometer

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators

A Mems Accelerometer with an Auto-Tuning System Based on an Electrostatic Anti-Spring

A Micro Resonant Charge Sensor with Enhanced Sensitivity Based on Differential Sensing Scheme and Leverage Mechanisms