A self-centering and stiffness-controlled MEMS accelerometer

Yiming Jin,Zhipeng Ma,Ziyi Ye,Mingkang Li,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1038/s41378-023-00647-4

2024-01-18

Microsystems & Nanoengineering

Abstract:Abstract This paper presents a high-performance MEMS accelerometer with a DC/AC electrostatic stiffness tuning capability based on double-sided parallel plates (DSPPs). DC and AC electrostatic tuning enable the adjustment of the effective stiffness and the calibration of the geometric offset of the proof mass, respectively. A dynamical model of the proposed accelerometer was developed considering both DC/AC electrostatic tuning and the temperature effect. Based on the dynamical model, a self-centering closed loop is proposed for pulling the reference position of the force-to-rebalance (FTR) to the geometric center of DSPP. The self-centering accelerometer operates at the optimal reference position by eliminating the temperature drift of the readout circuit and nulling the net electrostatic tuning forces. The stiffness closed-loop is also incorporated to prevent the pull-in instability of the tuned low-stiffness accelerometer under a dramatic temperature variation. Real-time adjustments of the reference position and the DC tuning voltage are utilized to compensate for the residue temperature drift of the proposed accelerometer. As a result, a novel controlling approach composed of a self-centering closed loop, stiffness-closed loop, and temperature drift compensation is achieved for the accelerometer, realizing a temperature drift coefficient (TDC) of approximately 7 μg/°C and an Allan bias instability of less than 1 μg.

nanoscience & nanotechnology,instruments & instrumentation

What problem does this paper attempt to address?

The paper aims to address the severe drift issues of MEMS accelerometers under temperature variations. Specifically, the authors propose a MEMS accelerometer with self-centering and stiffness control functions, achieving DC/AC electrostatic stiffness tuning capability through a double-sided parallel plate (DSPP). This design not only adjusts the effective stiffness but also corrects the geometric offset of the mass block. Additionally, the paper develops a dynamic model that considers DC/AC electrostatic tuning and temperature effects, and based on this model, proposes a self-centering closed loop to pull the reference position of the force balance loop (FTR) back to the geometric center of the DSPP. By real-time adjustment of the reference position and DC tuning voltage, the residual drift caused by temperature is compensated, resulting in a high-performance MEMS accelerometer with a temperature drift coefficient of approximately 7μg/°C and Allan deviation stability of less than 1μg.

Key innovations of the paper include:
1. **Self-centering closed loop**: Ensures the accelerometer operates at the optimal reference position by eliminating temperature drift of the readout circuit and nullifying net electrostatic tuning force.
2. **Stiffness closed loop**: Prevents pull-in instability of the tuned low-stiffness accelerometer under drastic temperature changes.
3. **Temperature drift compensation**: Achieves high-precision temperature control by integrating self-centering closed loop, stiffness closed loop, and temperature drift compensation.

The integration of these technologies significantly enhances the temperature adaptability and stability of MEMS accelerometers, allowing them to maintain high performance even in environments with high temperature variations.