Self Calibration by ON/OFF Sensitivity Switching - Feasibility Study of a Resonant Accelerometer

Alexandra Zobova,Slava Krylov

2024-09-24

Abstract:This research provides the theoretical feasibility study of a novel architecture of a MEMS differential resonant accelerometer, with switchable and tunable electrostatic transmission between the proof mass and the vibrating sensing beams. The same beams are used for sensing of the inertial force, while the transmission is switched ON, and for the device's calibration, when the transmission is OFF. Therefore, the beams' response in the OFF state is affected by the same factors (temperature, electronics, packaging) as in the ON state, with the only exception for the acceleration. This unique ability to physically disconnect the inertial force from the sensing elements opens possibilities for new schemes of the signal processing, including sensitivity tuning, zero-bias correction and on-the-fly self-calibration of the sensor. The device includes a proof mass (PM) and two force-transmitting frames that are attached to the substrate by the suspension springs, such that there is no direct mechanical connection between the PM and the frames. Two identical sensing beams are attached at their ends to the frames and the substrate. When the electrostatic transmission is switched ON by applying a voltage between the PM and frames, the force is transmitted from the PM through the frame to the beams. Disturbance in the electrostatic field, due to the acceleration-dependent displacement of the PM, results in the shift in the beam axial force and, therefore, in its resonant frequency, assuring the device's acceleration sensing. Furthermore, the change in the control voltage tunes the transmission of the input signal, and therefore the scale factor and the dynamic range of the sensor. An analytic model of the generic device is formulated and verified using finite elements analysis. The tunability of the device and the compensation of the scale factor thermal sensitivity are demonstrated using the model.

Signal Processing

What problem does this paper attempt to address?

The problems that this paper attempts to solve mainly focus on the design and performance optimization of differential resonant accelerometers in Micro - Electro - Mechanical Systems (MEMS). Specifically, the paper proposes a MEMS differential resonant accelerometer with an innovative architecture, which has the functions of tunable and switched electrostatic force transmission and can transmit inertial signals from the mass block to the sensing element. The core objectives of the paper are as follows:

1. **Propose a new architecture**: The paper introduces a new micro - electro - mechanical inertial sensor architecture that allows tunable and switched electrostatic force transmission between the mass and the vibrating sensing beam. In this way, the connection between the inertial force and the sensing element can be physically disconnected without affecting other factors (such as temperature, electronic components, packaging, etc.).

2. **Feasibility study**: A feasibility study of this new resonant differential accelerometer was carried out through analytical models and finite - element analysis. The focus of the study was to verify the theoretical feasibility and practical performance of this design.

3. **Temperature compensation**: The paper proposes a temperature compensation method aimed at reducing the impact of temperature changes on sensor performance. This method utilizes the response characteristics of the sensor in different working states to ensure high measurement accuracy even when the temperature changes.

4. **Self - calibration ability**: The paper explores how to use the switching function of electrostatic force transmission to achieve self - calibration of the sensor. By calibrating the sensor in the "off" state, the influence of the acceleration signal can be eliminated, thereby achieving zero - offset correction and sensitivity adjustment.

5. **Trade - off between dynamic range and sensitivity**: The paper also discusses how to optimize the dynamic range and sensitivity of the sensor through the tuning of electrostatic force transmission. By adjusting the control voltage, the input signal transmitted to the sensing element can be changed, thereby adjusting the scale factor and dynamic range of the sensor.

Overall, this paper aims to solve the limitations of existing accelerometers in terms of temperature compensation, self - calibration, dynamic range, and sensitivity by introducing a new MEMS differential resonant accelerometer architecture, thereby improving their overall performance.