A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler

Hemin Zhang,Guillermo Sobreviela,Dongyang Chen,Milind Pandit,Jiangkun Sun,Chun Zhao,Ashwin Seshia
DOI: https://doi.org/10.1109/LED.2020.3020527
IF: 4.8157
2020-01-01
IEEE Electron Device Letters
Abstract:An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower the coupling factor of the coupled resonators thus improving the parametric amplitude ratio sensitivity, a stiff anchor support is employed as a mechanical coupler between resonators. A coupling factor of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$7.4\times 10^{-5}$ </tex-math></inline-formula> was obtained, which is so far the lowest mechanical coupling factor that has been reported for weakly coupled MEMS sensors. As a result, the proposed mode-localized accelerometer demonstrates an input-referred bias instability as high as 280ng within an integration time from 3s to 300s, and an input-referred noise floor of 250ng/ <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\surd $ </tex-math></inline-formula> Hz, without utilizing temperature control or other environmental compensation, benchmarking as the highest resolution mode-localized accelerometer to-date. These metrics are comparable to state-of-the-art MEMS frequency-modulated resonant and capacitive accelerometers while exhibiting superior common-mode rejection to environmental effects.
What problem does this paper attempt to address?