Abstract:Weakly coupled resonators (WCRs) predicated on the mode localization phenomenon have found widespread utility in the topological design of high-performance sensors. However, the pronounced nonlinearity derived from the loci veering around the zero point imposes a significant constraint on the measurement range of mode-localized sensors. This article introduces a novel single-port readout circuit aimed at realizing full-scale linear sensing for mode-localized sensors. In our proposed methodology, we employ not only the conventional frequency closed-loop control but also introduce an amplitude closed-loop system incorporating automatic gain control (AGC). This AGC-based approach is utilized to maintain the amplitude product of resonant units at a standardized value. Consequently, we can consider the difference of squared amplitudes as the sensor output, which serves to effectively capture and characterize the fluctuations in external input signals. Furthermore, we have applied our proposed readout circuit to test a prototype of a micro-electro-mechanical system (MEMS) mode-localized accelerometer. The experimental results unequivocally affirm that the tested accelerometer prototype achieves linear sensing throughout the entire measurement range. Remarkably, it demonstrates a mechanical sensitivity of 0.1182/g, coupled with a maximum nonlinearity of -6.54%, and a bias stability of 19.23 mg, alongside a noise floor of V/Hz . These outcomes align closely with the output metric based on the subtraction of reciprocal amplitude ratios (SRARs). Our proposed methodology not only facilitates full-scale linear sensing for mode-localized sensors but also streamlines the signal extraction process, all while preserving the electromechanical performance. This advancement holds significant promise for the expansion of the application landscape for mode-localized sensors.

A Novel Dual-Mass Accelerometer Exploiting Mode Localization in Electrostatically Coupled Resonators

Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators

An asymmetric mode-localized mass sensor based on the electrostatic coupling of different structural modes with distributed electrodes

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

Nonlinearity enhanced mode localization in two coupled MEMS resonators

Mode-Localized Z-Axis Accelerometer

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

A Novel Biaxial Resonant Micro Accelerometer with Microleverage Mechanism

Circuit Implementation Enabling Full-Scale Linear Sensing in Mode-Localized Sensors

Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor With a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing

Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing

Design and dynamic analysis of a highly sensitive MEMS gyroscope based on mode localization.

A Highly Sensitive Biaxial Resonant Accelerometer with Two-Stage Microleverage Mechanisms

Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis

Design Of A High-Sensitivity Micromechanical Resonant Accelerometer With A Two-Stage Microlever

A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

Toward High-Resolution Inertial Sensors Employing Parametric Modulation in Coupled Micromechanical Resonators