Abstract:In recent years, the mode localisation phenomenon of weakly coupled resonators has been successfully utilised to improve the sensitivity of microelectromechanical system(MEMS) sensors. However,controversy remians about the resolution limits of mode-localised sensors. This paper asks two questions of the community: what are the resolution limits of the mode-localised sensors, and can the resolution improvement be obtained using mode-localised sensing? To answer these questions, we report a series of resolution models of mode-localised sensors. We conclude that mode-localised sensing can realise a higher measuring resolution by orders of magnitude when more than three resonators are weakly coupled, and this will lay the theoretical foundation for a breakthrough for the MEMS sensors industry.

Resolution Limit of Mode-Localised Sensors