Optical mode localized sensing in on-chip coupled microring resonators

Hailong Pi,Shumeng Wang,Yu Feng,Jize Yan

DOI: https://doi.org/10.1364/oe.540523

IF: 3.8

2024-10-19

Optics Express

Abstract:Hailong Pi, Shumeng Wang, Yu Feng, Jize Yan Mode localization, predicted in solid-state physics, has attracted great attention in coupled micro-electro-mechanical system (MEMS) ... [Opt. Express 32, 39996-40006 (2024)]

optics

What problem does this paper attempt to address?

Theory analysis of the optical mode localized sensing based on coupled ring resonators

Yu Feng,Shumeng Wang,Goran Mashanovich,Jize Yan

DOI: https://doi.org/10.1364/OE.434400

2021-09-27

Abstract:Based on Mason's signal flow graph analysis, an analytical model of the optical mode localization based on coupled ring resonators is established. The correctness of the theoretical model is proved by simulation. High sensitivity and common-mode rejection can be achieved by evaluating the modal power ratio from resonant peaks as sensing output. Based on the four-port structure, two output spectrum with mode localization (asymmetric mode splitting) and symmetric mode splitting allows the high-sensitivity sensing and dual-channel calibration to be carried out simultaneously, which can reduce the sensing errors. Monte-Carlo analysis showed that fabrication imperfection changes less than 6% of the performance in 90% cases, thus the construction of practical sensors is possible with appropriate tuning. The optical mode localized sensing has advantages in sensitivity, accuracy, anti-aliasing compared with conventional micro-mechanical mode localized sensor. Various types of high-sensitive sensor can be constructed through coupling parametric perturbation with measurands in different physical domains.
Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Ding Chun,Yaqiang Wang,Yuelin Wang-,Zhonghe Jin

DOI: https://doi.org/10.1109/ICSICT.1998.786542

1998-01-01

Abstract:A flow-sensor and a resonator are fabricated on silicon substrate using the micromechanical technology. The devices are with a structure based on a silicon cantilever with waveguide on the surface to detect the movement of the silicon cantilever. The method to couple the laser into the waveguide is discussed and the performance of the fabricated devices are characterized.
Resolution Limit of Mode-Localised Sensors

Zhang Zhao,Chang Honglong

DOI: https://doi.org/10.1007/s11432-020-2974-9

2020-01-01

Science China Information Sciences

Abstract:In recent years, the mode localisation phenomenon of weakly coupled resonators has been successfully utilised to improve the sensitivity of microelectromechanical system(MEMS) sensors. However,controversy remians about the resolution limits of mode-localised sensors. This paper asks two questions of the community: what are the resolution limits of the mode-localised sensors, and can the resolution improvement be obtained using mode-localised sensing? To answer these questions, we report a series of resolution models of mode-localised sensors. We conclude that mode-localised sensing can realise a higher measuring resolution by orders of magnitude when more than three resonators are weakly coupled, and this will lay the theoretical foundation for a breakthrough for the MEMS sensors industry.
A Coupled-Mode Analysis of Mode Localization on Weakly-Coupled Silicon Micromechanical Resonators with Damping

Man-Na Zhang,Rui Wang,Shang-Yang Zhang,Li-Feng Wang,Qing-An Huang

DOI: https://doi.org/10.1016/j.sna.2024.115822

2024-01-01

Abstract:Mode localization on weakly-coupled silicon resonators in the areas of microelectromechanical systems (MEMS) has been widely studied for highly sensitive sensors of physical and chemical parameter monitoring. In terms of its operation principle, i.e., energy conservation, a system for the weakly-coupled silicon resonator is required to have no damping. In fact, however, various types of energy dissipation mechanisms inevitably lead to the damping even under high vacuum packaging, and for mass sensing scenarios it always operates in high damping environments. The effect of damping on the amplitude and frequency of the weakly-coupled silicon resonator is generally explored by numerical methods. Based on a weak coupling approximation, this article has developed a coupled-mode model for analytically analyzing the effects. A pair of electrostatically-coupled silicon resonator were experimentally fabricated and operated through capacitive transduction. The theoretical and experimental results show a quantitative consistency. The results presented here suggest that it may guide the design of sensors based on mode localization in the presence of damping.
Mode-localized sensing in micro- and nano-mechanical resonator arrays

Ashwin A. Seshia

DOI: https://doi.org/10.1109/icsens.2016.7808399

2016-10-01

Abstract:Micromachined resonant sensors have been researched for several decades for a variety of applications with potential benefits in terms of improved sensitivity and scalability relative to other transduction principles. Conventional implementations usually involve detection elements monitoring resonant frequency and/or dissipation shift in a single degree-of-freedom or several independent degrees-of-freedom. This paper discusses a complementary approach to resonant sensing in which the eigenstates in coupled array structures can be employed as a read-out mechanism offering the potential for both increased sensitivity and excellent common mode rejection. The technique, dubbed “mode-localized sensing”, is based on the spatial localization of vibration in an array of nearly identical weakly coupled resonators wherein the eigenstates are seen to be sensitive signatures of symmetry-breaking perturbations in structural parameters. The sensing methodology has been applied to a range of applications including gravimetric sensing, electrometry, inertial sensors and force sensors where in high accuracy approaches to physical transduction are often of interest. The paper concludes with a discussion of the current challenges in the field and an outlook on future developments.
The Research Progress on Mode-localized Sensors

ZHANG Zhao,CHANG Honglong

DOI: https://doi.org/10.3901/jme.2020.13.032

2020-01-01

Journal of Mechanical Engineering

Abstract:：Mode localization phenomenon is proposed by Nobel Prize winner ANDERSON in 1958, which has a great impact on the understanding of the electron conduction processes in disordered solids, and it is an important discovery in the field of solid state physics.In recent years, the phenomenon of mode localization has been applied to design of sensors.The mode-localized sensors take the amplitude ratios between different resonators as the output metric and realize the ultra-high sensitivity.the relationship between amplitude ratio and system structure parameters and explains are revealed how to improve the sensitivity of mode localization sensors.The design rules of mode-localized sensors are given by several examples of mode-localized sensors.
Nonlinearity enhanced mode localization in two coupled MEMS resonators

Zhonghua Liu,Yuzhi Chen,Xuefeng Wang,Yutao Xu,Hongsheng Dai,Zhan Shi,Haibo Wan,Xueyong Wei,Ronghua Huan

DOI: https://doi.org/10.1016/j.ijmecsci.2024.109133

IF: 7.3

2024-02-25

International Journal of Mechanical Sciences

Abstract:As an intriguing phenomenon in coupled dynamic systems, mode localization has garnered considerable attention in areas such as vibration control, sensing, etc. This paper investigates mode localization in two coupled MEMS resonators in both linear and nonlinear cases through experimental and theoretical analyses. The relationship of amplitude variation or energy transfer between two resonators in mode localization is unveiled. Subsequently, considering the influence of softening Duffing nonlinearity, we derive the scaling factor expression. For the first time, the experimental and theoretical results reveal that the presence of softening Duffing nonlinearity significantly enhances the sensitivity of the amplitude ratio compared to the linear case. Finally, a charge sensing scheme is proposed that utilizes nonlinear mode localization. This innovative scheme outperforms its linear counterpart, achieving an almost 5-fold increasement in charge sensing resolution. This advancement holds the potential to design high-performance sensors with significantly improved sensitivity.

engineering, mechanical,mechanics
Wide-range Optical Sensors Based on a Single Ring Resonator with Polarization Multiplexing

Yongheng Yue,Huihui Zhu,Ziwei Cao,Jianjun He,Mingyu Li

DOI: https://doi.org/10.3788/col201917.031301

IF: 2.56

2019-01-01

Chinese Optics Letters

Abstract:Wide-range optical sensors based on a single ring resonator are investigated theoretically and experimentally. The sensor worked at the TE and TM modes simultaneously. Because the sensitivities of the TE mode and TM mode are different, the TE mode is used for the large measurement range, and the TM mode is used for the high sensitivity measurement. The experimental results showed that the measurement range for the TE mode was almost three times larger than that of the TM mode. A sensitivity of 233 nm/RIU was achieved for the wavelength interrogation of the TM mode.
Optical sensor based on embedded microring

Wei Hong,Qian Chen,Guohua Gu

DOI: https://doi.org/10.1049/cp.2012.2410

2012-01-01

Abstract:A novel optical sensor based on embedded microring is presented. The theoretical analysis of embedded microring has been obtained by transfer matrix method (TMM). The simulation results show that the resonator frequency will be spaced narrow enough to produce coherent signal by a broad laser signal which show this structure can be applied in frequency beat system as an optical sensor. Furthermore, the simulation results also show the position of two embedded microring has little influence of the resonator frequency.
On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Chen Qiu,Jianyi Yang,Xiaoqing Jiang

DOI: https://doi.org/10.1109/pgc.2012.6458084

2012-01-01

Abstract:An on-chip interrogator for wavelength-modulated optical sensors is developed based on a thermal tunable silicon microring resonator. The center wavelength of the sensors can be readout from the tuning power corresponding to the peak optical output intensity of the system by scanning the resonant wavelength of the microring filter. Both on-chip (microring) and off-chip (FBG) wavelength-modulated sensor are interrogated by our microring interrogator.
Localization of Laterally Confined Modes in a 2D Semiconductor Microcavity

Xuewen Zhang,Lishu Wu,Weihuang Yang,Shun Feng,Xu Wang,Xingwang Zhang,Jingzhi Shang,Wei Huang,Ting Yu

DOI: https://doi.org/10.1021/acsnano.2c00914

IF: 17.1

2022-03-22

ACS Nano

Abstract:Monolayer semiconductor embedded planar microcavities are becoming a promising light-matter interacting system to uncover a wealth of photonic, excitonic, and polaritonic physics at the two-dimensional (2D) limit. In these 2D semiconductor microcavities employing the longitudinal Fabry-Perot resonance, major attention has been paid to the coupling of excitons with vertically confined cavity photons; by contrast, the lateral confinement effect on exciton-photon interactions is still elusive. Here we observe the localized distribution of laterally confined modes with discrete energies in a 2D semiconductor embedded microcavity. Monolayer tungsten disulfides with equilateral triangular geometries but varied edge lengths are selected as the active media incorporated into a dielectric planar microcavity. With the shortening of the edge length, photoluminescence mappings of active regions present spatially localized emission patterns, which are attributed to the presence of in-plane triangular waveguiding resonance caused by total internal reflection at the one-dimensional closed boundary between the monolayer semiconductor and its surrounding cavity material. Unlike the conventional quantum confinement effect of native excitons appearing at the nanometer scale, the mode emission at the active-medium center exhibits apparent size-dependent features at the micrometer scale due to the optical confinement effect correlated with its photonic nature. By reducing the area of active media, single-mode dominant emission is achieved together with its nondispersive energy and improved directionality. Our work highlights the crucial role of lateral mode control in monolayer semiconductor embedded planar microcavities and encourages the investigation of the quantum billiard problem in 2D semiconductors.
Cascaded Silicon-on-insulator Double-Ring Sensors Operating in High-Sensitivity Transverse-Magnetic Mode.

Xianxin Jiang,Junjun Ye,Jun Zou,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1364/ol.38.001349

2013-01-01

Abstract:We report the experimental results of a highly sensitive silicon photonic biosensor based on two cascaded ring resonators operating in transverse-magnetic mode. The sensitivities of wavelength interrogation method and intensity interrogation method reach 24,300 nm/RIU and 2,430 dB/RIU, respectively.
Mode and Sensing Properties of a Silicon-Based Hybrid Plasmonic Microring Resonator

Meng Zhang,Genzhu Wu,Daru Chen,Binbin Liu

DOI: https://doi.org/10.1007/s12596-019-00552-y

IF: 2.1

2019-01-01

Journal of Optics

Abstract:A novel silicon hybrid plasmonic microring resonator consisting of a silver nanoring on top of a silicon-on-insulator ring is proposed and investigated theoretically for possible applications in sensing at the deep subwavelength scale. By using the finite-element method, insight into how the mode properties (Q factor, effective mode volume, energy ratio, sensitivity) depend on the geometric structure of the hybrid microring resonator is presented. Simulation results reveal that this kind of hybrid microcavity maintains a high Q factor ∼600, an ultrasmall mode volume of 0.15 μm3, and high sensitivity of 497 nm/refractive index unit for refractive index sensing. The hybrid plasmonic microcavity with optimized geometric structures presented provides the potential for ultracompact sensing applications.
Localized Topological States beyond Fano Resonances via Counter-Propagating Wave Mode Conversion in Piezoelectric Microelectromechanical Devices

Jacopo M. De Ponti,Xuanyi Zhao,Luca Iorio,Tommaso Maggioli,Marco Colangelo,Benyamin Davaji,Raffaele Ardito,Richard V. Craster,Cristian Cassella

2024-06-23

Abstract:A variety of scientific fields like proteomics and spintronics have created a new demand for on-chip devices capable of sensing parameters localized within a few tens of micrometers. Nano and microelectromechanical systems (NEMS/MEMS) are extensively employed for monitoring parameters that exert uniform forces over hundreds of micrometers or more, such as acceleration, pressure, and magnetic fields. However, they can show significantly degraded sensing performance when targeting more localized parameters, like the mass of a single cell. To address this challenge, we present a new MEMS device that leverages the destructive interference of two topological radiofrequency (RF) counter-propagating wave modes along a piezoelectric Aluminum Scandium Nitride (AlScN) Su-Schrieffer-Heeger (SSH) interface. The reported MEMS device opens up opportunities for further purposes, including achieving more stable frequency sources for communication and timing applications.

Applied Physics
Mode localization in plasmonic optomechanical resonators for ultrasensitive infrared sensing

Yulong Hao,Xinyao Yu,Tingting Lang,Fanghao Li

DOI: https://doi.org/10.1364/oe.509972

IF: 3.8

2024-01-23

Optics Express

Abstract:Yulong Hao, Xinyao Yu, Tingting Lang, Fanghao Li Uncooled infrared thermal detectors are gaining increasing attention owing to their ability to operate at room-temperature and their low ... [Opt. Express 32, 3922-3932 (2024)]

optics
Novel optical sensor based on the silicon crossing-coupled microring resonator

Huaxiang Yi,Qifeng Long,Xingjun Wang,Zhiping Zhou

DOI: https://doi.org/10.1109/GROUP4.2011.6053796

2011-01-01

Abstract:A fabrication friendly crossing-coupled microring resonator was utilized to construct a compact and robust optical sensor which demonstrated a high sensitivity of 225nm/RIU experimentally. © 2011 IEEE.
Mode-splitting-based Optical Label-Free Biosensing with a Biorecognition-Covered Microcavity

Xu Yi,Yun-Feng Xiao,Yin Feng,Dong-Ying Qiu,Jing-Yi Fan,Yan Li,Qihuang Gong

DOI: https://doi.org/10.1063/1.4725424

IF: 2.877

2012-01-01

Journal of Applied Physics

Abstract:A pair of counter-propagating high-Q whispering-gallery modes (WGMs) can couple to each other and produce two new modes with a significant resonance splitting when single or multi-Rayleigh scatterers are adsorbed on the microcavity surface. In this paper, we investigate the mode-splitting-based biosensing by using a biorecognition-covered WGM microcavity because the pre-covering is essentially necessary for label-free detection of specific biological targets. It is shown that the quantitative detection, e.g., nanoparticle sizing, is strongly affected by the biorecognition, and the minimum target size suitable for detection is subjected to the surface pre-covering ratio. To eliminate this degradation induced by biorecognition, we further propose to use the total linewidth broadening of the two new modes as the detection signal, which is immune to thermal fluctuation.
Single-molecule optofluidic microsensor with interface whispering gallery modes

Xiao-Chong Yu,Shui-Jing Tang,Wenjing Liu,Yinglun Xu,Qihuang Gong,You-Ling Chen,Yun-Feng Xiao

DOI: https://doi.org/10.1073/pnas.2108678119

IF: 11.1

2022-02-03

Proceedings of the National Academy of Sciences

Abstract:Significance Optical microresonators have emerged as promising platforms for label-free detection of molecules. However, approaching optimum sensitivity is hindered due to the weak tail of evanescent fields. Here, we report the implementation of the interface modes for ultrasensitive sensing in a microbubble resonator. With the electromagnetic field peaked at the interface between the optical resonator and the analyte solution, interface modes enable sensing of biomolecules with a detection limit of 0.3 pg/cm 2 . Single-molecule detection is further demonstrated using the plasmonic-enhanced interface modes. In addition, intrinsically integrated into a microfluidic channel, the sensor exhibits ultrasmall sample consumption down to 10 pL, providing an automatic platform for biomedical analysis.

multidisciplinary sciences
Optomechanical Sensing with On-Chip Microcavities

Yi-Wen Hu,Yun-Feng Xiao,Yong-Chun Liu,Qihuang Gong

DOI: https://doi.org/10.1007/s11467-013-0384-y

2013-01-01

Frontiers of Physics

Abstract:The coupling between optical and mechanical degrees of freedom has been of broad interest for a long time. However, it is only until recently, with the rapid development of optical microcavity research, that we are able to manipulate and utilize this coupling process. When a high Q microcavity couples to a mechanical resonator, they can consolidate into an optomechanical system. Benefitting from the unique characteristics offered by optomechanical coupling, this hybrid system has become a promising platform for ultrasensitive sensors to detect displacement, mass, force and acceleration. In this review, we introduce the basic physical concepts of cavity optomechanics, and describe some of the most typical experimental cavity optomechanical systems for sensing applications. Finally, we discuss the noise arising from various sources and show the potentiality of optomechanical sensing towards quantum-noise-limited detection.
Simultaneous Optical and Mechanical Sensing Based on Optomechanical Resonators

Elena Sentre-Arribas,Alicia Aparicio-Millán,Aristide Lemaître,Ivan Favero,Javier Tamayo,Montserrat Calleja,Eduardo Gil-Santos

DOI: https://doi.org/10.1021/acssensors.3c02103

IF: 8.9

2024-01-03

ACS Sensors

Abstract:Optical and mechanical resonators have each been abundantly employed in sensing applications, albeit following separate development. Here we show that bringing together optical and mechanical resonances in a unique sensing device significantly improves the sensor performance. To that purpose, we employ nanoscale optomechanical disk resonators that simultaneously support high quality optical and mechanical modes localized in tiny volumes, which provide extraordinary sensitivities. We perform...

chemistry, multidisciplinary, analytical,nanoscience & nanotechnology

Optical mode localized sensing in on-chip coupled microring resonators

Theory analysis of the optical mode localized sensing based on coupled ring resonators

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Resolution Limit of Mode-Localised Sensors

A Coupled-Mode Analysis of Mode Localization on Weakly-Coupled Silicon Micromechanical Resonators with Damping

Mode-localized sensing in micro- and nano-mechanical resonator arrays

The Research Progress on Mode-localized Sensors

Nonlinearity enhanced mode localization in two coupled MEMS resonators

Wide-range Optical Sensors Based on a Single Ring Resonator with Polarization Multiplexing

Optical sensor based on embedded microring

On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Localization of Laterally Confined Modes in a 2D Semiconductor Microcavity

Cascaded Silicon-on-insulator Double-Ring Sensors Operating in High-Sensitivity Transverse-Magnetic Mode.

Mode and Sensing Properties of a Silicon-Based Hybrid Plasmonic Microring Resonator

Localized Topological States beyond Fano Resonances via Counter-Propagating Wave Mode Conversion in Piezoelectric Microelectromechanical Devices

Mode localization in plasmonic optomechanical resonators for ultrasensitive infrared sensing

Novel optical sensor based on the silicon crossing-coupled microring resonator

Mode-splitting-based Optical Label-Free Biosensing with a Biorecognition-Covered Microcavity

Single-molecule optofluidic microsensor with interface whispering gallery modes

Optomechanical Sensing with On-Chip Microcavities

Simultaneous Optical and Mechanical Sensing Based on Optomechanical Resonators