Abstract:Due to its closed-loop structure, the silicon microring resonator can have a very high quality factor value and its output intensity is very sensitive to different wavelengths. These characters, plus the potential in CMOS compatible fabrication process, are making the silicon microring resonator a key building block of photonic integrated circuits for the applications of filtering, switching, modulation, and wavelength conversion. In parallel, the silicon microring resonator has also been proposed as a compact and highly sensitive optical sensor. In recent years, microring sensing related research and development has been growing consistently and rapidly for the purposes of environment monitoring, health diagnosis, and drug development. This article will firstly review the recent development in silicon microring sensors, which are mainly concentrated in two areas: to improve the sensitivity and to enhance selectivity. In order to have better understanding of this class of sensors, the basic structure of the microring sensors, its working principle, and its unique properties will be described. Then, our own works, in particular, the methods to improve dynamic range, sensitivity, and stability of the silicon microring sensors, will be presented. By studying the fundamental optical properties of the coupled microring resonators, novel silicon microring sensors with better and more reliable sensing performance are constructed. Finally, through studying the interactions between chemistry and optics, acceleration and optics, the specific applications in glucose sensing and seismic sensing are discussed.

Optical sensor based on embedded microring

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Label-free Optical Quantification of Protein Interactions Using Two Cascaded-Microring Resonators-Based Waveguide Sensors

Tunable Microring Based On-Chip Interrogator for Wavelength-Modulated Optical Sensors

High-sensitivity Optical Sensors Based on Cascaded Reflective MZIs and Microring Resonators

Tunable Microring Filter Based On-Chip Interrogator for Wavelength-Modulated Optical Sensor

Temperature-insensitive optical sensors based on two cascaded identical microring resonators

Optical Waveguide Double-Ring Sensor Using Intensity Interrogation with a Low-Cost Broadband Source

Intensity-Interrogated Sensor Based on Cascaded Fabry–Perot Laser and Microring Resonator

On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Experimental Investigation of Waveguide Sensor Based on Cascaded-Microring Resonators with Vernier Effect

Wide-range Optical Sensors Based on a Single Ring Resonator with Polarization Multiplexing

High-Sensitivity and Wide-Range Optical Sensor Based on Three Cascaded Ring Resonators

Highly-sensitive Optical Sensor Using Two Cascaded-Microring Resonators with Vernier Effect

Optical Sensors Based on Cascaded Micro-Ring Resonators with Thermo-Optical Tuning

Silicon Microring Sensors *

Highly Sensitive Optical Sensor Based on Two Cascaded Micro-Ring Resonators with an LED Light Source

On-chip Microwave Signal Generation Based on a Silicon Microring Modulator.

Dual-band Optical Filter Based on a Single Microring Resonator Embedded with Nanoholes

An Integrated Optical Sensor Based on Cascaded Polarization Convertor and Slot Waveguide Microring Resonator