Novel optical sensor based on the silicon crossing-coupled microring resonator

Huaxiang Yi,Qifeng Long,Xingjun Wang,Zhiping Zhou

DOI: https://doi.org/10.1109/GROUP4.2011.6053796

2011-01-01

Abstract:A fabrication friendly crossing-coupled microring resonator was utilized to construct a compact and robust optical sensor which demonstrated a high sensitivity of 225nm/RIU experimentally. © 2011 IEEE.

What problem does this paper attempt to address?

High-Sensitivity and Wide-Range Optical Sensor Based on Three Cascaded Ring Resonators

Yong Liu,Yang Li,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1364/oe.25.000972

IF: 3.8

2017-01-01

Optics Express

Abstract:We demonstrate a three cascaded micro-ring resonators based refractive index optical sensor with a high sensitivity of 5866 nm/RIU, the measurement range of which is significantly improved 24.7 times comparing with the traditional two cascaded micro-ring resonators.
Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Ding Chun,Yaqiang Wang,Yuelin Wang-,Zhonghe Jin

DOI: https://doi.org/10.1109/ICSICT.1998.786542

1998-01-01

Abstract:A flow-sensor and a resonator are fabricated on silicon substrate using the micromechanical technology. The devices are with a structure based on a silicon cantilever with waveguide on the surface to detect the movement of the silicon cantilever. The method to couple the laser into the waveguide is discussed and the performance of the fabricated devices are characterized.
High-sensitivity Optical Sensors Based on Cascaded Reflective MZIs and Microring Resonators

H. H. Zhu,Y. H. Yue,Y. J. Wang,M. Zhang,L. Y. Shao,J. J. He,M. Y. Li

DOI: https://doi.org/10.1364/oe.25.028612

IF: 3.8

2017-01-01

Optics Express

Abstract:High-sensitivity optical sensors based on the cascaded reflective MZIs and the microring resonators are investigated theoretically and experimentally. The free spectral ranges of the microring and the reflective MZI are designed to be similar in order to produce Vernier effect. A high sensitivity of 1892dB/RIU of the optical sensor was achieved for the intensity interrogation. The measurement average power shows 13 dB increment comparing to that of the traditional two cascaded microring resonators. It’s meaningful for the realization of the low-cost portable systems and application in biochemical sensing.
Optical Sensors Based on Cascaded Micro-Ring Resonators with Thermo-Optical Tuning

Zhiping Yang,Yanlu Wang,Chang Su,Jian-Jun He,Mingyu Li

DOI: https://doi.org/10.1117/12.2573588

2020-01-01

Abstract:Although the cascaded double ring sensor can improve the sensitivity due to the difference between the radii of the reference ring and the sensing ring to produce Vernier effect, a large bandwidth spectrometer or a large tunable range laser is required for the wavelength interrogation. In this paper, the cascaded double ring senor based on silicon on insulator (SOI) with thermo-optical tuning for refractive index sensing is investigated. The peak wavelength shift of the transmission envelope can be converted into the electric power change of the micro-heater. The sensitivity reaches 33.703×103 mW/RIU by fitting Gaussian function to the spectral envelope for the wavelength interrogation with 7.9 nm wavelength measurement range.
Highly-sensitive Optical Waveguide Sensor Based on SiON Using Two Cascaded-Microring Resonators

Luping Zhu,Mingyu Li,Junjun Ye,Jian-Jun He

DOI: https://doi.org/10.1364/acp.2012.as4e.2

2012-01-01

Abstract:A waveguide sensor using two cascaded micro-ring resonators based on silicon oxynitride (SiON) waveguide was investigated. The refractive index change of 2.9×10-7 can be measured through intensity interrogation with a low-cost broadband light source.
Highly-Sensitive Silicon-On-Insulator Sensor Based on Two Cascaded Micro-Ring Resonators with Vernier Effect

Lei Jin,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1016/j.optcom.2010.08.035

IF: 2.4

2011-01-01

Optics Communications

Abstract:A highly-sensitive integrated optical biosensor based on two cascaded micro-rings resonator (MRR) is investigated theoretically and experimentally. The free spectral ranges (FSRs) of two cascaded micro-rings are designed to be slightly different in order to generate Vernier effect. A preliminary investigation of our sensor with a Q factor of 2×104 using different ethanol concentrations shows that the Vernier effect can improve the sensitivity to 1300nm per refractive index unit (RIU), compared to 62nm/RIU for a single ring sensor. The sensor also has a large measurement range of refractive index change up to 1.15×10−2 RIU. It can be useful for low-cost and highly-sensitive optical biosensor system.
Temperature-insensitive optical sensors based on two cascaded identical microring resonators

Guoshuai Su,Mingyu Li,Zhiping Yang,Jiayi Xie,Yuxia Song,Jian-Jun He

DOI: https://doi.org/10.1364/OL.463589

IF: 3.6

2022-01-01

Optics Letters

Abstract:We demonstrate a novel, to the best of our knowledge, temperature-insensitive optical sensor based on two cascaded identical microring resonators (CIMRR) in this Letter. The structural parameters of the reference ring and sensing ring are designed to be identical. The upper cladding in the sensing windows of the two rings is removed. With different microfluidic channels, the reference ring and sensing ring are exposed to the reference solution and reagent sample, respectively. For wavelength interrogation experiments in the transmission spectrum contrast ratio and low-cost intensity interrogation experiments, the sensitivities of refractive index (RI) sensing are 3402.4 dB/RIU and 1087.3 dB/RIU, respectively, while the temperature sensitivities are as low as 0.023 dB/K and 0.0124 dB/K, respectively. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
Cascaded Silicon-on-insulator Double-Ring Sensors Operating in High-Sensitivity Transverse-Magnetic Mode.

Xianxin Jiang,Junjun Ye,Jun Zou,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1364/ol.38.001349

2013-01-01

Abstract:We report the experimental results of a highly sensitive silicon photonic biosensor based on two cascaded ring resonators operating in transverse-magnetic mode. The sensitivities of wavelength interrogation method and intensity interrogation method reach 24,300 nm/RIU and 2,430 dB/RIU, respectively.
High-sensitivity silicon photonic biosensors based on cascaded resonators

Xianxin Jiang,Jinyan Song,Lei Jin,Jianjun He

DOI: https://doi.org/10.1117/12.2001581

2012-01-01

Abstract:Silicon photonic biosensors based on cascaded resonators employing the Vernier effect are shown to be capable of greatly increasing the sensitivity. Two implementation schemes are presented, one using two cascaded ring resonators with a broadband light source, and the other by cascading a Fabry-Perot laser with a silicon ring resonator. Simple intensity interrogation schemes are developed to advance the planar waveguide sensor technology towards low-cost practical applications.
Micro-ring Resonator Optical Sensor Based on Silicon and Silicon Nitride Waveguide

Jinsheng Ni,Mingyu Li,Jianjun He,Chang Su

DOI: https://doi.org/10.1117/12.2533464

2019-01-01

Abstract:In this paper, we compare the sensing sensitivity, the stability and the temperature sensitivity of the micro-ring resonator optical sensor based on silicon waveguide and silicon nitride waveguide. For the silicon waveguide and silicon nitride waveguide single ring, the sensing sensitivities are 1113nm/RIU and 182.64nm/RIU, the resonance wavelength variations are ±12.5pm and ±7.5pm in an hour testing at the ambient temperature and the temperature sensitivities are 0.038nm/K and 0.018nm/K, respectively. . The sensing sensitivity can be improved to 6080.6nm/RIU by cascaded double silicon nitride waveguide rings to produce Vernier effect.
Silicon Microring Sensors *

Zhiping Zhou,Huaxiang Yi

DOI: https://doi.org/10.1117/12.908551

2017-01-01

Abstract:Due to its closed-loop structure, the silicon microring resonator can have a very high quality factor value and its output intensity is very sensitive to different wavelengths. These characters, plus the potential in CMOS compatible fabrication process, are making the silicon microring resonator a key building block of photonic integrated circuits for the applications of filtering, switching, modulation, and wavelength conversion. In parallel, the silicon microring resonator has also been proposed as a compact and highly sensitive optical sensor. In recent years, microring sensing related research and development has been growing consistently and rapidly for the purposes of environment monitoring, health diagnosis, and drug development. This article will firstly review the recent development in silicon microring sensors, which are mainly concentrated in two areas: to improve the sensitivity and to enhance selectivity. In order to have better understanding of this class of sensors, the basic structure of the microring sensors, its working principle, and its unique properties will be described. Then, our own works, in particular, the methods to improve dynamic range, sensitivity, and stability of the silicon microring sensors, will be presented. By studying the fundamental optical properties of the coupled microring resonators, novel silicon microring sensors with better and more reliable sensing performance are constructed. Finally, through studying the interactions between chemistry and optics, acceleration and optics, the specific applications in glucose sensing and seismic sensing are discussed.
Optical Ring Resonator Biosensor for Small Molecule Detection

Ziwei Cao,Jian-Jun He,Yirong Guo,Mingyu Li

DOI: https://doi.org/10.1364/acpc.2017.s4i.5

2017-01-01

Abstract:We demonstrate a highly-sensitive SOI biosensor based on single ring with shallow etched grating coupler for detecting small molecule. To improve the sensitivity, the waveguide were designed for TM mode. The sensitivity is 0.061nm/ppm.
Silicon-nanowire-based Optical Sensor with High Sensitivity and Large Measurement Range by Using Mach-Zehnder Interferometer-Coupled Microring

Jianwei Wang,Sailing He,Daoxin Dai

DOI: https://doi.org/10.1109/acp.2010.5682539

2010-01-01

Abstract:Mach-Zehnder interferometer-coupled microring is demonstrated for optical sensing for the first time, with a high sensitivity (~111 nm /RIU), a high extinction ratio (>; 26 dB). The MZI-coupled microring sensor still has good performance when the reflective index of the ambient materials largely changes (1 <; n<; 1.538).
Optical Waveguide Double-Ring Sensor Using Intensity Interrogation with a Low-Cost Broadband Source

Lei Jin,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1364/ol.36.001128

2011-01-01

Abstract:A highly sensitive optical waveguide sensor based on simple intensity interrogation with a broadband light source is proposed and investigated. It consists of two cascaded microring resonators with the same or slightly different free spectral ranges. The variation of the refractive index of the analyte sample results in a large shift in the envelope function of the transmission peaks of the sensor, and, consequently, a large change in the transmitted power. The low-cost sensing scheme can achieve an ultrahigh sensitivity of 2 x 10(4) dB/RIU. Experimental results on the intensity interrogated double-ring sensor using a broadband source are presented, demonstrating its operation principle and potential for low-cost practical applications. (C) 2011 Optical Society of America
On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Chen Qiu,Jianyi Yang,Xiaoqing Jiang

DOI: https://doi.org/10.1109/pgc.2012.6458084

2012-01-01

Abstract:An on-chip interrogator for wavelength-modulated optical sensors is developed based on a thermal tunable silicon microring resonator. The center wavelength of the sensors can be readout from the tuning power corresponding to the peak optical output intensity of the system by scanning the resonant wavelength of the microring filter. Both on-chip (microring) and off-chip (FBG) wavelength-modulated sensor are interrogated by our microring interrogator.
Tunable Microring Based On-Chip Interrogator for Wavelength-Modulated Optical Sensors

Ao Shen,Chen Qiu,Longzhi Yang,Tingge Dai,Yubo Li,Hui Yu,Yinlei Hao,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1016/j.optcom.2014.11.067

IF: 2.4

2014-01-01

Optics Communications

Abstract:An interrogation system for wavelength-modulated optical sensors based on tunable microring filter has been proposed and demonstrated both theoretically and experimentally. The wavelength shift of the sensors can be readout from the shift of the peak optical output of the system by scanning the resonant wavelength of the microring filter. We fabricate the interrogator on the silicon-on-insulator platform and a fiber Bragg grating sensor (FBG) is precisely interrogated. The Lorentz spectrum of the microring filter can de-flatten the output spectrum of the FBG and improve the interrogating resolution efficiently. Such a technique potentially provides a compact (only 50×50μm2), low-cost, and high-performance (1pm resolution) approach for the interrogation of the wavelength-modulated sensor and distributed sensor arrays.
Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Jian-Jun He

DOI: https://doi.org/10.1109/piers.2016.7734728

2016-01-01

Abstract:Summary form only given. Optical waveguide sensors based on silicon-on-insulator (SOI) nanowire have received great interest due to their potential applications in many fields including bacteria and virus detection, medical diagnostics, food quality control, environment monitoring, and drug development. Various types of SOI sensors have been developed, including Mach-Zehnder interferometer, microdisks and microring resonators. High-sensitivity sensors based on cascaded double-ring resonators and a Mach-Zehnder interferometer (MZI) cascaded with a microring resonator employing Vernier effect have recently been proposed and experimentally demonstrated. Simple and low-cost intensity interrogation can be employed without using a high resolution spectrometer or a narrow line-width tunable laser. Label-free detection capability of these two types of SOI sensors have also been demonstrated. This talk reviews our work on the design, fabrication and measurement of SOI nanowire based high-sensitivity biosensors employing Vernier effect. Biosensing experiments using cascaded double-ring sensor and Mach-Zehnder-ring sensor integrated with microfluidic channels are also presented.
Ultra-sensitive Silicon Photonic Current Sensor Using a Ring Resonator

Bing Wei,Changyun Zhao,Gencheng Wang,Tingge Dai,Yuehai Wang,Jianyi Yang,Yubo Li

DOI: https://doi.org/10.1088/2040-8978/18/8/085802

IF: 2.1

2016-01-01

Journal of Optics

Abstract:We proposed and experimentally investigated a compact and ultra-sensitive integrated photonic current sensor based on a silicon ring resonator in this paper. The current flowing through the integrated resistive TiN heater produces the Joule's heat and changes the temperature, which results in the change of refractive index and physical dimensions of the ring. An optical spectrum analyzer is used to monitor the resonant wavelength shift of the ring. The experiment results show that the sensor achieves an ultra-high sensitivity of 6.8. x. 10(4) nm A(-2) and good linearity between real-time current and wavelength shift in the test range of 0-10 mA.
Experimental Investigation of Waveguide Sensor Based on Cascaded-Microring Resonators with Vernier Effect

Lei Jin,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1364/cleo.2010.jwa84

2010-01-01

Abstract:An optical sensor based on two cascaded microring resonators is fabricated in silicon-on-insulator waveguide. A Q-factor of 2×104 is measured and the increase of refractive index sensitivity by using Vernier effect is investigated experimentally.

Novel optical sensor based on the silicon crossing-coupled microring resonator

High-Sensitivity and Wide-Range Optical Sensor Based on Three Cascaded Ring Resonators

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

High-sensitivity Optical Sensors Based on Cascaded Reflective MZIs and Microring Resonators

Optical Sensors Based on Cascaded Micro-Ring Resonators with Thermo-Optical Tuning

Highly-sensitive Optical Waveguide Sensor Based on SiON Using Two Cascaded-Microring Resonators

Highly-Sensitive Silicon-On-Insulator Sensor Based on Two Cascaded Micro-Ring Resonators with Vernier Effect

Temperature-insensitive optical sensors based on two cascaded identical microring resonators

Cascaded Silicon-on-insulator Double-Ring Sensors Operating in High-Sensitivity Transverse-Magnetic Mode.

High-sensitivity silicon photonic biosensors based on cascaded resonators

Micro-ring Resonator Optical Sensor Based on Silicon and Silicon Nitride Waveguide

Silicon Microring Sensors *

Optical Ring Resonator Biosensor for Small Molecule Detection

Silicon-nanowire-based Optical Sensor with High Sensitivity and Large Measurement Range by Using Mach-Zehnder Interferometer-Coupled Microring

Optical Waveguide Double-Ring Sensor Using Intensity Interrogation with a Low-Cost Broadband Source

On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Tunable Microring Based On-Chip Interrogator for Wavelength-Modulated Optical Sensors

Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Ultra-sensitive Silicon Photonic Current Sensor Using a Ring Resonator

Experimental Investigation of Waveguide Sensor Based on Cascaded-Microring Resonators with Vernier Effect