Multi-modal resonance measurement capable of discerning and visualizing effects due to excitation schemes in mems resonator

Bo Xu,Jiankai Zhu,Tongqiao Miao,Jing Li,Qingyang Deng,Song Wu,Ting Wen,Fei Wang,Xiaoping Hu,Xuezhong Wu,Dingbang Xiao,Zenghui Wang

DOI: https://doi.org/10.1109/NEMS51815.2021.9451375

2021-01-01

Abstract:The capability of characterizing MEMS resonant sensors using different driving mechanisms and measuring their resonant response in multiple physical domains can offer insights into the resonant response of the devices. Here, we present our work using a multi-modal resonance measurement system that enables driving the same MEMS resonator using electrical, optothermal and mechanical excitation schemes, and provides information of the resonant response in both spectral and spatial domains. We show that for the exact same device under the same measurement environment, different driving mechanisms can lead to important differences in resonance frequency, quality factor, and mode shape. Our findings can lead to new insights into the dynamics of such resonant sensors, and important implications for characterization protocols.