Abstract:Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·10 6 , the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses.

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