Abstract:Weakly coupled resonators (WCRs) predicated on the mode localization phenomenon have found widespread utility in the topological design of high-performance sensors. However, the pronounced nonlinearity derived from the loci veering around the zero point imposes a significant constraint on the measurement range of mode-localized sensors. This article introduces a novel single-port readout circuit aimed at realizing full-scale linear sensing for mode-localized sensors. In our proposed methodology, we employ not only the conventional frequency closed-loop control but also introduce an amplitude closed-loop system incorporating automatic gain control (AGC). This AGC-based approach is utilized to maintain the amplitude product of resonant units at a standardized value. Consequently, we can consider the difference of squared amplitudes as the sensor output, which serves to effectively capture and characterize the fluctuations in external input signals. Furthermore, we have applied our proposed readout circuit to test a prototype of a micro-electro-mechanical system (MEMS) mode-localized accelerometer. The experimental results unequivocally affirm that the tested accelerometer prototype achieves linear sensing throughout the entire measurement range. Remarkably, it demonstrates a mechanical sensitivity of 0.1182/g, coupled with a maximum nonlinearity of -6.54%, and a bias stability of 19.23 mg, alongside a noise floor of V/Hz . These outcomes align closely with the output metric based on the subtraction of reciprocal amplitude ratios (SRARs). Our proposed methodology not only facilitates full-scale linear sensing for mode-localized sensors but also streamlines the signal extraction process, all while preserving the electromechanical performance. This advancement holds significant promise for the expansion of the application landscape for mode-localized sensors.

The Research Progress on Mode-localized Sensors

Resolution Limit of Mode-Localised Sensors

Suppression on Nonlinearity of Mode-Localized Sensors Using Algebraic Summation of Amplitude Ratios As the Output Metric

Linear Sensing for Mode-Localized Sensors

On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

A NOVEL HIGH SENSITIVE MODE-LOCALIZATION MEMS ELECTRIC FIELD SENSOR BASED ON CLOSED-LOOP FEEDBACK

Circuit Implementation Enabling Full-Scale Linear Sensing in Mode-Localized Sensors

Design of A Novel Self-Powered Sensor Structure Based on Internal Resonance and Mode Localization with Adjustable Coupling

Nonlinearity enhanced mode localization in two coupled MEMS resonators

Characterization of forced localization of disordered weakly coupled micromechanical resonators

Mode-localized sensing in micro- and nano-mechanical resonator arrays

Theory analysis of the optical mode localized sensing based on coupled ring resonators

A Self-Sustained Mass Sensor with Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators

Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators

SELF-OSCILLATION FOR MODE LOCALIZED SENSORS

A MODE-LOCALIZED MEMS ACCELEROMETER IN THE MODAL OVERLAP REGIME EMPLOYING PARAMETRIC PUMP

Nonlinearity Modulation in a Mode-Localized Mass Sensor Based on Electrostatically Coupled Resonators under Primary and Superharmonic Resonances

Algebraic Summation of Eigenstates As a Novel Output Metric to Extend the Linear Sensing Range of Mode-Localized Sensors

Exploiting Nonlinearity to Enhance the Sensitivity of Mode-Localized Mass Sensor Based on Electrostatically Coupled MEMS Resonators

Enhanced Sensitivity and Stability of a Novel Resonant MEMS Electric Field Sensor Based on Closed-Loop Feedback