Abstract:Weakly coupled resonators (WCRs) predicated on the mode localization phenomenon have found widespread utility in the topological design of high-performance sensors. However, the pronounced nonlinearity derived from the loci veering around the zero point imposes a significant constraint on the measurement range of mode-localized sensors. This article introduces a novel single-port readout circuit aimed at realizing full-scale linear sensing for mode-localized sensors. In our proposed methodology, we employ not only the conventional frequency closed-loop control but also introduce an amplitude closed-loop system incorporating automatic gain control (AGC). This AGC-based approach is utilized to maintain the amplitude product of resonant units at a standardized value. Consequently, we can consider the difference of squared amplitudes as the sensor output, which serves to effectively capture and characterize the fluctuations in external input signals. Furthermore, we have applied our proposed readout circuit to test a prototype of a micro-electro-mechanical system (MEMS) mode-localized accelerometer. The experimental results unequivocally affirm that the tested accelerometer prototype achieves linear sensing throughout the entire measurement range. Remarkably, it demonstrates a mechanical sensitivity of 0.1182/g, coupled with a maximum nonlinearity of -6.54%, and a bias stability of 19.23 mg, alongside a noise floor of V/Hz . These outcomes align closely with the output metric based on the subtraction of reciprocal amplitude ratios (SRARs). Our proposed methodology not only facilitates full-scale linear sensing for mode-localized sensors but also streamlines the signal extraction process, all while preserving the electromechanical performance. This advancement holds significant promise for the expansion of the application landscape for mode-localized sensors.

A NOVEL HIGH SENSITIVE MODE-LOCALIZATION MEMS ELECTRIC FIELD SENSOR BASED ON CLOSED-LOOP FEEDBACK

Enhanced Sensitivity and Stability of a Novel Resonant MEMS Electric Field Sensor Based on Closed-Loop Feedback

The Research Progress on Mode-localized Sensors

A Self-Sustained Mass Sensor with Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators

Desig of a novel closed-loop electrostatic voltage sensor based on weakly coupled resonators

A mode-localized DC electric field sensor

SELF-OSCILLATION FOR MODE LOCALIZED SENSORS

Circuit Implementation Enabling Full-Scale Linear Sensing in Mode-Localized Sensors

Resolution Limit of Mode-Localised Sensors

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators

A High-Sensitivity Micromechanical Electrometer Based on Mode Localization of Two Degree-of-Freedom Weakly Coupled Resonators

A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation

Exploiting Nonlinearity to Enhance the Sensitivity of Mode-Localized Mass Sensor Based on Electrostatically Coupled MEMS Resonators

Design of an Ultra-Sensitive MEMS Force Sensor Utlizing Mode Localisation in Weakly Coupled Resonators

A New Chip-Scale Magnetic Field Sensor Based on Oscillation Mode Optomechanical Detection

A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization

Linear Sensing for Mode-Localized Sensors

Design of a Microelectromechanical Systems Resonant Electric Field Sensor with Sensitivity Robustness

The Stability of the Closed-Loop Feedback Circuit for Fiber-Optic Weak Magnetic Field Sensor

Design of Biological Sensors Utilising Mode-Localisation in Electrostatically Coupled Microresonators