Control methods for drive mode of MEMS vibratory gyroscope with spring hardening nonlinearity

Xu-kai DING,Hong-sheng LI,Yun-fang NI,An-cheng SHAO

DOI: https://doi.org/10.13695/j.cnki.12-1222/o3.2015.03.018

2015-01-01

Abstract:In driving mode of MEMS gyroscope,the spring hardening nonlinearity would become significant when with large vibration amplitude. To solve this problem,two control methods,i.e. phase-locked loop(PLL) and self-oscillation loop,are compared in the presence of such a nonlinearity. The comparison results show that the driving method of PLL would fail to track the resonant frequency of the nonlinear mode due to the phase-response hysteresis in frequency domain,while the self-oscillation loop can drive the nonlinear mode to stabilize at a resonance frequency thanks to the working principle of the self-oscillation loop. A modified digital PLL drive method is presented,which can significantly improve the stability at the cost of a large driving force. Experiment results show that they are in agreement with those of the simulations,verifying the feasibility of the proposed driving method.