Analysis and experiment of drive mode of silicon micro-gyroscope based on digital phased-locked loop control

Xiaolei Wang,Yinqiang Zhang,Cheng Yang,Hongsheng Li

DOI: https://doi.org/10.3969/j.issn.1001-0505.2013.04.014

2013-01-01

Abstract:In order to control the drive mode of a silicon micro-gyroscope effectively, a phase control scheme based on the digital phase-locked loop (PLL) control is put forward to trace and control the vibration frequency of the drive signal. First, the drive mode characteristics of the silicon micro-gyroscope are analyzed, and a digital PLL method for controlling the frequency of the drive signal is proposed. Secondly, the theory of the silicon micro-gyroscope closed-loop control based on the PLL is elaborated, and the stability of the PLL frequency control is analyzed. Then, the frequency changing and tracing characteristics based on PLL control in the drive mode are simulated, and the drive frequency dynamic tracing characteristic are verified. Finally, a digital circuit scheme with field programming gate array (FPGA) based on the PLL control is designed and the real circuit is manufactured. Besides, the open loop resonant frequency and the closed loop tracing frequency to drive the silicon micro-gyroscope are compared by experiments. The results demonstrate that when the temperature is between-40 and 60°C, the proposed control scheme can ensure that the drive frequency traces the resonant frequency change constantly, and the relative error is 2.5×10-5.