Abstract:The traditional closed-loop drive circuit had a deviation between the frequency of the output signal and the inherent frequency of the micromachined gyroscope along the driving direction,and the frequency jitter was not very small. Moreover,this circuit had a long settling time. In order to find a solution, by investigating the principle of the closed-loop drive method for the micromachined gyroscope, a closed-loop drive circuit based on the phase-locked technology was presented. Under stable condition, the drive signal of this circuit had the same frequency and phase as the sensitive electric current, and the gyroscope resonated along the driving direction. This proposed circuit improved the frequency character of the output signal. The simulation results show that there is no deviation between the frequency of the output signal and the gyroscope’s inherent frequency when using this circuit,the frequency jitter and settling time of this circuit are 38% and 50% of the traditional circuit, respectively. The experimental results demonstrate the feasibility of the method.

Closed-Loop Drive Circuit for the Micromachined Gyroscope Based on the Phase-Locked Technology