Abstract:This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

A Self-Oscillating Driving Circuit for Low-Q MEMS Vibratory Gyroscopes

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

Analysis on Digital Automatic Gain Control of MEMS Gyro Driven-Loop Circuit

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Constant-frequency Oscillation Control for Vibratory Micro-Machined Gyroscopes

One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

Performance Improvement for MEMS Gyroscopes by Suppressing the Circuit Phase Delay

High Performance Interface Circuit for MEMS Gyroscope

A Novel Amplitude-Phase Information Extraction Architecture for MEMS Vibratory Gyroscopes Using a Modified Double Side-Band Demodulation Configuration

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

A Low-Noise HV Interface Circuit for MEMS Vibratory Gyroscope

Analysis and Design of Drive Closed-Loop for Mems Vibratory Gyroscope

A New Self-Oscillation Loop for MEMS Vibratory Gyroscopes

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Analysis and design of a 3rd order velocity-controlled closed-loop for MEMS vibratory gyroscopes

Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm

Design of Digital Demodulation Circuit for Closed Loop Control of Resonant MEMS Gyroscopes

An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control