Abstract:This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vibration, which gives the gyroscope system good robustness. In order to realize the co-simulation of the mechanically sensitive structure and interface circuit of the gyroscope, the equivalent electrical model analysis and modeling of the mechanically sensitive structure of the gyro are carried out by Verilog-A. According to the design scheme of the MEMS gyroscope interface circuit, a system-level simulation model including mechanically sensitive structure and measurement and control circuit is established by SIMULINK. A digital-to-analog converter (ADC) is designed for the digital processing and temperature compensation of the angular velocity in the MEMS gyroscope digital circuit system. Using the positive and negative diode temperature characteristics, the function of the on-chip temperature sensor is realized, and the temperature compensation and zero bias correction are carried out simultaneously. The MEMS interface ASIC is designed using a standard 0.18 μM CMOS BCD process. The experimental results show that the signal-to-noise ratio (SNR) of sigma-delta (ΣΔ) ADC is 111.56 dB. The nonlinearity of the MEMS gyroscope system is 0.03% over the full-scale range.

A Low-Noise HV Interface Circuit for MEMS Vibratory Gyroscope

A Low-noise High-voltage Interface Circuit for Capacitive MEMS Gyroscope.

A High-Voltage Interface Circuit for MEMS Vibratory Gyroscope

A low-noise SC-type interface asic for a closed-loop MEMS gyroscope

High Performance Interface Circuit for MEMS Gyroscope

A Low-Noise High-Linearity Interface ASIC for MEMS Gyroscopes

An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control

A Low-Noise Readout Interface For Silicon Mems Vibratory Gyroscope

Designing of a Micromachined Gyroscope System with a Closed-Loop DC Biased Interface ASIC

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

A Dual-Axis MEMS Vibratory Gyroscope ASIC with 0.0061°/s/vhz Noise Floor over 480 Hz Bandwidth

A low-noise interface for MEMS vibration gyroscope based on a novel power-efficient C/V conversion structure

A Low-Noise Readout Circuit for Mems Vibratory Gyroscope

A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes

A Large Dynamic Range CMOS Readout Circuit for MEMS Vibratory Gyroscope

An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving

A Low-Noise Interface ASIC for MEMS Disk Resonator Gyroscope

Low Noise Interface ASIC of Micro Gyroscope with Ball-disc Rotor.

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

Integrated readout and drive circuits for a microelectromechanical gyroscope

A control and readout circuit with capacitive mismatch auto-compensation for MEMS vibratory gyroscope