Abstract:High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation in complementary metal oxide semiconductor (CMOS) process. Aiming at the urgent need for high-precision MEMS accelerometers in geophones, we carried out relevant research on high-performance closed-loop application specific integrated circuit (ASIC) chips. According to the characteristics of the performance parameters and output signal of MEMS accelerometers used in geophones, a high-precision closed-loop interface ASIC chip based on electrostatic time-multiplexing feedback technology and proportion integration differentiation (PID) feedback control technology was designed and implemented. The interface circuit consisted of a low-noise charge-sensitive amplifier (CSA), a sampling and holding circuit, and a PID feedback circuit. We analyzed and optimized the noise characteristics of the interface circuit and used a capacitance compensation array method to eliminate misalignment of the sensitive element. The correlated double sampling (CDS) technology was used to eliminate low-frequency noise and offset of the interface circuit. The layout design and engineering batch chip were fabricated by a standard 0.35 μm CMOS process. The active area of the chip was 3.2 mm × 3 mm. We tested the performance of the accelerometer system with the following conditions: power dissipation of 7.7 mW with a 5 V power supply and noise density less than 0.5 μg/Hz1/2. The accelerometers had a sensitivity of 1.2 V/g and an input range of ±1.2 g. The nonlinearity was 0.15%, and the bias instability was about 50 μg.

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A Low-Noise HV Interface Circuit for MEMS Vibratory Gyroscope

A Low-noise High-voltage Interface Circuit for Capacitive MEMS Gyroscope.

A Low-Noise High-Linearity Interface ASIC for MEMS Gyroscopes

High Performance Interface Circuit for MEMS Gyroscope

An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control

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A High-Voltage Interface Circuit for MEMS Vibratory Gyroscope

A low-noise interface for MEMS vibration gyroscope based on a novel power-efficient C/V conversion structure

A Closed-Loop Mems Accelerometer with Capacitive Sensing Interface Asic

A Dual-Axis MEMS Vibratory Gyroscope ASIC with 0.0061°/s/vhz Noise Floor over 480 Hz Bandwidth

An Improved Phase-Robust Configuration for Vibration Amplitude-Phase Extraction for Capacitive MEMS Gyroscopes

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

A control and readout circuit with capacitive mismatch auto-compensation for MEMS vibratory gyroscope