Abstract:In this paper, we use the nonlinear hardening stiffness of drive mode deal with the contradiction between gain and bandwidth of the linear micro-gyroscope, to improve the bandwidth and gain in sense direction. Firstly, in order to adjust the distance between two resonant peaks, we changed an incomplete two-degree-of-freedom(2-DoF) sense mode system of the micro-gyroscope into a complete 2-DoF system. Afterward, according to the given nonlinear coefficient of stiffness of drive mode, the structure size of driving micro-beams was designed to obtain a nonlinear micro-gyroscope with controllable stiffness. Finally, we investigated the effects of peaks spacing, damping, and driving nonlinearity on gain and bandwidth, and the nonlinear micro-gyroscope was optimized by orthogonal experiment method and response surface method. The results reveal that the peaks spacing has a great influence on the gain and bandwidth of both linear and nonlinear micro-gyroscopes. The larger the peaks spacing, the lower the gain, but higher gain can be achieved when the resonant frequency of the drive mode is close to the lower-order resonant frequency of the sense mode. Driving nonlinearity leads to the response peak of the Coriolis force to have a hardening characteristic, thus forming a wide platform in the sense direction. Hardening of the response peak of the Coriolis force allows the micro-gyroscope to obtain a higher gain while the bandwidth of the sense mode is also greatly improved. In addition, parameter optimization can make the gain and bandwidth of the micro-gyroscope optimal. When the peaks spacing is small and the nonlinear stiffness coefficient is about 1012.2, under the premise that the gain is basically constant, the bandwidth of the sense mode increases about 1.76 times compared with the linear gyroscope. Damping can suppress the influence of nonlinearity in a micro-gyroscope system. Within a certain range, the frequency response of the nonlinear micro-gyroscope tends to be a linear system with the increase in damping, resulting in narrower bandwidth and lower gain.

Research on Nonlinear Dynamics of Drive Mode in<i>Z</i>-Axis Silicon Microgyroscope

Analysis on Digital Automatic Gain Control of MEMS Gyro Driven-Loop Circuit

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

Nonlinear Dynamical System Model for Drive Mode Amplitude Instabilities in MEMS Gyroscopes

Design, Dynamics, and Optimization of a 3-DoF Nonlinear Micro-Gyroscope by Considering the Influence of the Coriolis Force

Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm

Nonlinearity Reduction in Disk Resonator Gyroscopes Based on the Vibration Amplification Effect

A Novel Closed-loop Drive Circuit for the Micromechined Gyroscope

Nonlinear Vibration of a Micro Piezoelectric Precision Drive System

Research on a Silicon Gyroscope Interface Circuit Based on Closed-Loop Controlled Drive Loop

Nonlinear vibration and performance analysis of a hybrid-driving T-beam micro-gyroscope with 2:1 internal resonance

Nonlinear vibration and amplitude ratio output performance of a resonant micro-gyroscope based on bifurcation detection

Analysis and Design of Drive Closed-Loop for Mems Vibratory Gyroscope

STUDY ON DYNAMIC CHARACTERISTIC OF A NOVEL SILICON MICROMACHINED GYROSCOPE

A novel nonlinear amplitude-modulation gyroscope incorporating internal resonance

Nonlinearity Measurement for Low-Pressure Encapsulated MEMS Gyroscopes by Transient Response

The Nonlinear Analysis of Readout Circuit for Microgyroscope

Design and Simulation of a Dual-Axis Sensing Decoupled Vibratory Wheel Gyroscope

Micro-vibration modeling and analysis of single-gimbal control moment gyros

Nonlinear dynamics investigation of a multi-axis drive system due to the kinematic joints

Tuning the primary resonance of vibrating beam micro-gyroscopes based on piezoelectric actuation and nonlinearity in curvature and inertia