Tuning the primary resonance of vibrating beam micro-gyroscopes based on piezoelectric actuation and nonlinearity in curvature and inertia

Chen, Hongyan

DOI: https://doi.org/10.1007/s00542-023-05435-8

2023-03-23

Microsystem Technologies

Abstract:In this paper, the nonlinear vibration characteristics of vibrating beam micro-gyroscopes subject to electric and piezoelectric actuation are studied. The comprehensive nonlinear model including nonlinearity in curvature, inertia and electrostatic force is considered. In the research of electrostatically actuated micro-gyroscopes, it's a novel way to tune the primary resonance by piezoelectric actuation and nonlinearity in curvature and inertia. The multiple scales method and numerical continuation technique are employed to characterize the frequency-amplitude and force-amplitude responses of the micro-gyroscope. The effect of the size-dependent, fringing field, external excitation, angular speed, piezoelectric DC voltage and nonlinearity in curvature and inertia on the nonlinear dynamic responses of the micro-gyroscopes is investigated in detail. The frequency-response results show that the small vibration produces a symmetrical frequency response curve in sense direction, while the system actually has significant softening characteristics in drive direction. The nonlinear multi-value problem is effectively reduced in sense direction under the size-dependent effect, which plays an important role in the design of detection instruments for micro-gyroscopes. Choosing a positive piezoelectric DC actuation voltage will obtain a higher sensitivity. Increasing the curvature nonlinearity and reducing the inertial nonlinearity of the gyroscopic system will help the micro-gyroscope obtain better sensitivity, and may eliminate multi-valued responses as much as possible.

engineering, electrical & electronic,materials science, multidisciplinary,nanoscience & nanotechnology,physics, applied