Abstract:This research is on the nonlinear dynamics of a two-sided electrostatically actuated capacitive micro-beam. The microresonator is composed of silicon and PZT as a piezoelectric material. PZT is functionally distributed along the height of the micro-beam according to the power law distribution. The micro-resonator is simultaneously subjected to DC piezoelectric and two-sided electrostatic actuations. The DC piezoelectric actuation leads to the generation of an axial force along the length of the micro-beam and this is used as a tuning tool to shift the primary resonance of the micro-resonator. The governing equation of the motion is derived by the minimization of the Hamiltonian and generalized to the viscously damped systems. The periodic solutions in the vicinity of the primary resonance are detected by means of the shooting method and their stability is investigated by determining the so-called Floquet exponents of the perturbed motions. The basins of attraction corresponding to three individual periodic orbits are determined. The results depict that the higher the amplitude of the periodic orbit, the smaller is the area of the attractor

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to study the nonlinear dynamic behavior of the functionally graded piezoelectric micro - resonator (FGP micro - resonator) near the primary resonance. Specifically, this study focuses on a capacitively - actuated double - side electrostatic micro - beam, which is composed of silicon and functionally graded piezoelectric material (PZT) distributed according to the power law. The main problems of the study include: 1. **Adjustment of the primary resonance frequency**: By applying a direct - current voltage (DC voltage), an axial force along the length of the micro - beam can be generated, thereby achieving the adjustment of the primary resonance frequency. This adjustment method can adjust the resonance frequency not only in the positive direction but also in the negative direction. 2. **Multistable response and stability analysis**: The frequency - response curves under different voltage conditions are studied, and the dynamic behavior of the system is analyzed by solving the periodic solutions and their stabilities. In particular, the hardening and softening effects and the basins of attraction of the periodic solutions are explored. 3. **Avoidance of pull - in instability**: Traditional single - side electrostatically - actuated micro - resonators are prone to pull - in instability, while the double - side electrostatically - actuated model proposed in this paper can effectively increase the pull - in voltage threshold, thereby enhancing the robustness of the device. 4. **Application of functionally graded materials**: Using functionally graded piezoelectric materials instead of pure silicon micro - beams overcomes the limitations of pure silicon micro - beams in piezoelectric deposition and improves the adjustability and reliability of the device. ### Key formulas - Expressions for the elastic modulus, density, and piezoelectric constant of functionally graded materials varying with thickness are: \[ E(z) = E_0 e^{\frac{2}{h} |z| \ln\left(\frac{E_u}{E_0}\right)} \] \[ \rho(z) = \rho_0 e^{\frac{2}{h} |z| \ln\left(\frac{\rho_u}{\rho_0}\right)} \] \[ e_{31}(z) = e_{31P} \left(e^{\frac{2}{h} |z| \ln\left(1 - \frac{P_0}{P_u} + P_u\right)} - 1 + P_0\right) \] - The total potential energy \(U\) of the system includes the bending strain energy \(U_b\), the strain energy caused by the axial force \(U_a\), and the strain energy caused by the piezoelectric axial force \(U_p\): \[ U = U_b + U_a + U_p \] where, \[ U_b = \frac{(EI)_{eq}}{2} \int_0^l \left(\frac{\partial^2 w}{\partial x^2}\right)^2 dx \] \[ U_a = \frac{(EA)_{eq}}{8l} \int_0^l \left(\frac{\partial w}{\partial x}\right)^2 dx \] \[ U_p = F_p \left(l_0 - l\right) = F_p \int_0^l \left(\frac{\partial w}{\partial x}\right)^2 dx \] - Nonlinear equation of motion: \[ \frac{\partial^4 w(x,t)}{\partial x^4} + \frac{\partial^2 w(x,t)}{\partial t^2} - \left[\alpha_1 + \alpha_2 - (w, w)\right] \frac{\partial^2 w(x,t)}{\partial x^2} + \alpha_3 \frac{\partial w(x,t)}{\partial t} = \alpha_4 \left[V_

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