Research on a Silicon Gyroscope Interface Circuit Based on Closed-Loop Controlled Drive Loop
Qiang Li,Lifeng Ding,Xiaowei Liu,Qiang Zhang
DOI: https://doi.org/10.3390/s22030834
IF: 3.9
2022-01-22
Sensors
Abstract:The existing analysis methods for the silicon gyroscope drive loop, such as the perturbation method and period average method, cannot analyze the dynamic characteristics of the system. In this work, a linearized amplitude control model of the silicon gyroscope drive loop was established to analyze the stability and set-up time of the drive loop, and the vibration conditions of the silicon gyro were obtained. According to the above results, a new silicon gyroscope interface circuit was designed, using a 0.35 μm Bipolar-CMOS-DMOS (BCD) process, and the chip area was 4.5 mm × 4.0 mm. The application-specific integrated circuit (ASIC) of the silicon gyroscope was tested in combination with the sensitive structure with a zero stability of 1.14°/hr (Allen). The test results for the ASIC and the whole machine prove the correctness of the theoretical model, which reflects the effectiveness of the stability optimization of the closed-loop controlled drive loop of the silicon gyroscope circuit.
engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation