The Nonlinear Analysis of Readout Circuit for Microgyroscope

Guan Shi Wang,Xiao Wei Liu
DOI: https://doi.org/10.4028/www.scientific.net/amr.981.125
2014-01-01
Advanced Materials Research
Abstract:In a vibratory microgyroscope, the nonlinear of the readout circuit is a critical part of the signal processing. This is because nonlinear can corrupt the resulting signals, including the angular velocity information. In this paper, issues related to nonliear are discussed. A detailed analysis of the effects caused by various nonidealities is provided. The nonlinear considered are as follows: the distance between the active comb and the fixed comb at the static modal and the equivalent capacitance at sensitive modal. In addition to the analysis of the nonlinear, which is necessary for a successful system-level design is provided.
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