Research of YBa2Cu3O7-δPyrolysis Films with Different Surface Morphologies by Low-Fluorine Metallorganic Deposition

Jie YU,Zhiyong LIU,Suchuan ZHAO,Zhaohui GU,Chuanyi BAI,Yuming LU,Yanqun GUO,Chuanbing CAI
DOI: https://doi.org/10.13380/j.cnki.chin.j.lowtemp.phys.2016.05.003
2016-01-01
Abstract:The surface morphology of YBa2 Cua O7-δ (YBCO) thin film is crucial to its superconducting performance.The pyrolysis process shows significant impacts on the surface morphology of the resultant films.The relationship between surface morphologies and heating parameters (heating rates and gas flows) is obtained in this paper.Under the condition of high gas flows,the cracks exist under the processing parameters with low heating rates,the smooth surface appears with heating rate rising and the coexistence of cracks and wrinkles appear if the heating rate increases further.Under the condition of low gas flows,the smooth surface also can be obtained in low heating rates but wrinkles exist when the heating rate rises.The smooth surface only appears in suitable conditions.The formation and evolution of films with defects are observed by in-situ device for further study and the relationship between film morphologies and heat treatment conditions is also obtained.The measurement of roughness suggests that the cracked films rather than the films with a smooth surface exhibit the lowest roughness,and the wrinkled films show the highest roughness,which inosculate with the explanation above.
What problem does this paper attempt to address?