The effects of heating and annealing processes on the surface morphology and quality of double-sided YBa 2 Cu 3 O 7−δ thin films

s y xu,c k ong,y l zhou,b l low,l f chen,xiaoe zhang
DOI: https://doi.org/10.1016/S0921-4534(97)01784-X
IF: 1.534
1998-01-01
Physica C: Superconductivity and its Applications
Abstract:A series of YBa2Cu3O7-delta (YBCO) double-sided thin films were prepared by pulsed-laser deposition (PLD) and measured by XRD, SEM, AFM, electrical-transport and microwave surface resistance (R-s) measurements. The results showed that the surface morphology of the first side of the film consisted of more troughs and big particles, while that of the second side of the film consisted of almost no troughs but small, bar-like oriented particles. The difference has been attributed to the heating and annealing processes during deposition. The improved substrate surface conditions for the deposition of the second side of the film led to better film quality in terms of the T-cO and R-s values. Our results implied that a pre-annealing process of the substrates and a proper post-annealing process of the films after deposition would improve the film quality and reduce the difference between the two sides of the YBCO films fabricated by PLD. (C) 1998 Elsevier Science B.V.
What problem does this paper attempt to address?