Electrical Properties of Er2O3 Thin Film

CHEN Sheng,XU Run,ZHU Yan-yan,FANG Ze-bo,XUE Fei,FAN Yong-liang,JIANG Zui-min
DOI: https://doi.org/10.3969/j.issn.1001-3679.2005.05.001
2005-01-01
Abstract:Erbia(Er_2O_3) is a hopeful high-κ material.We have realized thin Er_2O_3 film's growth on Si(100) by evaporating metallic Er source in oxygen ambience. Then we annealed it in oxygen ambience.From the results of C-V and I-V test,we can see the film's electrical properties are good.So we think this kind of material should be studied further.
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