The Growth and Morphology Characterization of GaN Micro-pyramid Structure

Chen ZHAO,Wei JIA,Teng FAN,Guangyun TONG,Tianbao LI,Guangmei ZHAI,Shufang MA,Bingshe XU
DOI: https://doi.org/10.11896/j.issn.1005-023X.2017.022.005
2017-01-01
Abstract:The GaN micro-pyramid was grown on unintentional doped GaN epitaxial layers with in-situ pre-deposited SiNx mask via metal organic chemical vapor deposition (MOCVD) .The effects of growth temperature ,growth time ,reaction pressure andⅤ/Ⅲ ratio on morphology of the GaN micro-pyramids were studied systematically .The results showed that the GaN micro-pyramid structures were formed at 1075 ℃ .As the growth time was prolonged from 3 min to 20 min ,the basal diameter of the GaN micro-pyramids increased from 3 .6μm to 19 .8μm ,while the density decreased from 3 .8 × 103 cm -2 to 0 .8 × 103 cm-2 .The final complete pyramid-like or truncated pyramid-like GaN micro-structures was mainly determined by reaction pressure and Ⅴ/Ⅲ ratio .These results pave the way for the controllable in-situ grow th of GaN micro/nano structures and may facilitate the further development of three-dimensional GaN-based LED devices .
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