Thin Film Optical Parameters Determination Using Adaptive Simulated Annealing Algorithm

LIU Peng,LIU Yu-ling,YU Fei-hong
DOI: https://doi.org/10.3969/j.issn.1005-5630.2005.04.016
2005-01-01
Abstract:This paper introduces a new method to determine the optical parameters of thin films using adaptive simulated annealing(ASA) algorithm and conjugate gradient(CG)algorithm.Based on the theory of thin film calculating,it uses the transmission tata through thin film over a range of wavelengths to calculate the optical parameters of thin film.The thickness and refractive index of a single layer Ta_2O_5 film is measured as an example.The experimental results show the calculated transmittance of the film is consistent with the measured value.The thickness error between different measurements is less than 3nm and the refractive index error at 540nm is less than 0.02.This method has the advantage of easy to operate,without hurt to the sample,with fast speed and high precision.
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