Determination of the Optical Constants of Solar-Control Amorphous Silicon Thin Films on Float Glass

Yong Liu,Lihong Ni,Jun Bo Liu,Qiying Liu,Chenlu Song,Gaorong Han
DOI: https://doi.org/10.1002/sia.3064
2009-01-01
Surface and Interface Analysis
Abstract:An improved method employing a modified Forouhi and Bloomer disperse model with a hybridized simulated annealing algorithm is implemented in this paper, allowing the determination of refractive index, extinction coefficient, and thickness of a-Si films at one time by fitting reflectance and transmitted spectra. The thickness of films obtained by this method has a reasonable agreement with the result by ellipsometric measurement, especially for samples with thickness in the range of 40-80 nm. The presented method exhibits low time consumption and cost, which implies a possibility of usage in real-time on-line measurement of solar-control coatings on float glass. Copyright (C) 2009 John Wiley & Sons, Ltd.
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