Thin Film Thickness Determination Using Adaptive Simulated Annealing Algorithm and Conjugate Gradient Algorithm

LIU Peng,LIU Yu-ling,HE Ying-bo,YU Fei-hong
DOI: https://doi.org/10.3969/j.issn.1003-501x.2005.06.026
2005-01-01
Abstract:According to the theories of thin film calculation and optimization, a new method for determining the thickness of thin film using Adaptive Simulation Annealing (ASA) algorithm and Conjugate Gradient (CG) algorithm is brought out. The mathematical model set up with this method searches cursorily with ASA and then search accurately with CG.This method reduces the dependence of non-contact inspection on initial conditions,raises the calculating speed obviously with high accuracy and adaptability. During experiment, the thickness of 3-layer thin film was calculated in 3 seconds with calculation error less than 4nm.
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