Optimization Algorithm for Ellipsometry Data Inversion of Optical Film

TONG Sheng-fei,WANG Zheng-yi,CHEN Xing
DOI: https://doi.org/10.3969/j.issn.1005-4642.2012.09.005
2012-01-01
Abstract:An iterative C++ program based on optimization algorithm with variable-step cycles was introduced,which could use only two sets of data to determine the true thickness of more than one period.The refractive index and thickness of one or more periods of the SiO2 and ZrO thin film were calculated.The results were more accurate than that of other solutions.For absorbing film,the probability of a particle appearing at some point was calculated according to the principles of quantum mechanics,and the particle position was determined by means of Monte Carlo simulation.Thus the particle was refreshed.The procedure based on quantum-behaved particle swarm optimization and simulated annealing hybrid algorithm was designed,which could quickly jump out of local minimum to ensure the accuracy and a faster convergence speed.
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