Extracting Optical Constants of Solid Materials with Micro-Rough Surfaces from Ellipsometry Without Using Effective Medium Approximation.

Yuanbin Liu,Jun Qiu,Linhua Liu,Bingyang Cao
DOI: https://doi.org/10.1364/oe.27.017667
IF: 3.8
2019-01-01
Optics Express
Abstract:The effective medium approximation (EMA) model may cause a large deviation in the data analysis of spectroscopic ellipsometry (SE) for solid materials with randomly micro-rough surfaces since it ignores the influence of the lateral irregularities of the rough surfaces on the electromagnetic scattering. In this work, a novel inversion framework is developed to extract optical constants from the SE parameters for solid materials with randomly micro-rough surfaces. Our approach enables the integration of the Levenberg-Marquardt optimization algorithm and the first-principles calculations of electromagnetic scattering. In each iterative step, the electromagnetic interactions with rough surfaces are accurately obtained from first-principles calculations without using the EMA model for rough estimation, which significantly guarantees the precision and wide applicability of our method for actual surfaces without a perfectly Gaussian height distribution. Furthermore, a superior advantage of our approach is that its error can be feasibly evaluated from the instrumental errors of the surface morphology detectors and the SE.
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