Impact of Ellipsometric Parameters Measurement Error on Measurement Accuracy of Thin Film Parameters

LIN Yuan-fang,HUANG Qiang-sheng,RU Qi-tian,SUN Shuo,ZHENG Xiao-dong

DOI: https://doi.org/10.3785/j.issn.1008-973x.2011.08.027

2011-01-01

Abstract:The error relationship between ellipsometric parameters and thin film parameters(i.e.,film thickness and refractive index) contained implicitly in the ellipsometric equation of a transparent homogenous dielectric thin film was analyzed based on the error transfer formula and the inverse functions theorem.Partial derivatives of ellipsometric parameters to thin film parameters at nominal thickness and refractive index were found so as to reverse their partial derivatives to ellipsometric parameters.Relationship curves of the thickness error as well as the refractive index error versus the ellipsometric parameters measurement error under different incident angles were drawn.The curves show that the above two errors caused by the ellipsometric parameters measurement error aren't the minimum at a same incident angle.The optimal incident angle corresponding to their respective minimum error varies with the incident wavelength,the nominal thickness,the nominal refractive index and the substrate refractive index.The measurement accuracy can be improved effectively if the measured thickness and refractive index under their respective optimal incident angles are taken as thin film parameters measurements.The above analysis is in accordance with experimental results measured on a laser ellipsometer.The above method has certain reference to the analysis of multiple variables error relationship and the optimal selection of their values in other transcendental equations.