Abstract:Mechanical properties of MEMS materials, the influence on mechanical properties by micromachining process, size effects on microactuators and microrobots were studied. Design and micromachining principles of silicon and thin films as MEMS structure material were proposed from mechanics' point of view. According to the minimum defect rule, MEMS structure should be as small as possible, and traditional machining process should be avoided. From the minimum stress rule, sharp angles should be avoided, and heat treatment should be applied. The maximum isolation rule indicated that hard cover films for contact surface were necessary in MEMS movable parts. Mechanical properties of thin films were closely related with the growing processes and the post treatment processes, therefore test structures were recommend for parameter determination. Size effects of electrostatic, piezoelectric, electromagnetic and SMA actuators were analyzed and synthesized. The output forces of most actuators were proportional to L 2 while the output forces of piezoelectric actuators were proportional to L 1, therefore micro piezoelectric actuators were the best actuators for MEMS. Dynamic properties of artificial ants, micro airplanes and artificial fishes in micro scales were studied. The required driving forces for artificial ants, micro airplanes, and artificial fishes were proportional to L 3, L 3, and L 4. It is concluded that microrobots could be driven to creep, fly and swim when their sizes were small enough. This work provided a theoretical base on design and fabrication of complex MEMS devices such as microrobots.

Research on the Principle of Micro Actuators

Study of MEMS microactuators

Research on Microelectron-Mechanical System and Its Application

Research On The Mechanism And Characteristics Of Electromagnetic Microactuator

Experimental Research on Output Performances of Giant Magnetostrictive Actuator

The application of micro field theory to MEMS actuators

Design and Research of the Point-Contact Optothermal Microactuator

Actuation Mechanism of Microvalves: A Review

Survey on MEMS Micromotor

Current Situation and Trend of Microassembly Robot for MEMS

Research Progress of Inchworm Actuator with MEMS Teeth

Research Progress on Flexible, Electrically Driven Microactuators

Study on Micro-Electromagnetic Force in Electromagnetic Microactuator

MECHANICAL PROPERTIES AND SCALING EFFECTS IN MICRO-ELECTRO-MECHANICAL SYSTEMS

Investigation of microvalve based on microelectromechanical systems

Micro Electromagnetic Actuator For Micropump

A Review and Prospect of Power MEMS

Micro Electromagnetic Actuator with High Energy Density Based on MEMS Technology

Micro Field in Mems Actuators

RESEARCH ON SEVERAL MECHANICAL PROBLEMS IN MICROELECTROMECHANICAL SYSTEMS

A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism