Design and Research of the Point-Contact Optothermal Microactuator

王旭龙琦,刘超,张冬仙
DOI: https://doi.org/10.3969/j.issn.1005-5630.2008.04.011
2008-01-01
Abstract:As the applications of micro electro-mechanical systems(MEMS) become wider in various fields,sorts of microactuators have chances to develop uninterruptedly.The principle of micro optothermal expansion and optothermal microactuator are introduced.We designed and fabricated a basic point-contact optothermal microactuator,and further developed an optimized one.Experiments were carried out to prove the feasibility of optothermal micro-actuation.The characteristic elegances of the optimized point-contact optothermal microactuator were further demonstrated through experiments.
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