Abstract:Lens actuator is one of the most important components in an optical pickup system, which decides the performance of the disc readout system. A significant advance in technical capability has recently been achieved in the fabrication of integrated micro lens actuators of optical pickup by microelectromechanical systems (MEMS) technology. A comb-drive tracking and focusing integrated lens actuator fabricated on a silicon-on-insulator (SOI) wafer has been reported. Two-dimensional tuning of the objective lens is generated by the integrated comb structures. Large displacements of about +/- 24.6 mu m in tracking direction and 5.7 mu m in focusing direction are demonstrated. The device has a high sensitivity and an ignorable coupling between the two dimensional driving movements. The small-form-factor device provides an excellent performance and size reduction. Furthermore, high quality polymer micro-lenses with high numerical aperture (NA) are fabricated on a pre-patterned hydrophobic glass substrate by liquid dispensing. The surface profiles are adjusted by the patterned diameter and the volume of the dispensed polymer, which is controlled by the dispensing time. This extremely low cost, high NA and easily fabricated lens represents an important step for further integration of the pickup system, thus expands the application area of optical storage.

Development of Tracking and Focusing Micro Actuators for Dual-Stage Optical Pick-Up Head

Integrated Bi-Directional Focusing and Tracking Actuators in a Monolithic Device for a MEMS Optical Pick-Up Head

Integrated Tracking and Focusing Systems of MEMS Optical Pickup Head

A Micro-Focusing Stage Applied to Optical Pick-Up Head

Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer

Micro Lens Actuator And Polymer Objective Lens For Optical Pickup

Design and Optimization for Microscope Autofocus Systems Based on the Analysis of Video Signals

Biomimetic optical system using polymer lenses with tunable focus

Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

A two-dimensional silicon-on-glass actuator with dispensed polymer microlens

Design, Fabrication, and Control of Components in Mems-Based Optical Pickups

Two-dimensional Silicon-on-glass Actuator Combined with a Dispensed Polymer Microlens

Design and Fabrication of A Small-Form-Factor Optical Pickup Head

Design and Research of the Point-Contact Optothermal Microactuator

A novel micro optical system employing inclined polymer mirrors and Fresnel lens for monolithic integration of optical disk pickup heads

Design of a Focusing Mechanism Actuated by Piezoelectric Ceramics for TMA Telescope

Implementation of CMOS-MEMS Compound Lens

Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup

Wafer Level Batch Fabrication and Assembly of Small Form Factor Optical Pickup Head

Integrated Lens Auto-Focus System Driven by a Nut-Type Ultrosonic Motor (USM)