Integrated Tracking and Focusing Systems of MEMS Optical Pickup Head

Hao-Der Cheng,Sheng-Yi Hsiao,Mingching Wu,Weileun Fang
DOI: https://doi.org/10.1109/TMAG.2006.888420
IF: 1.848
2007-01-01
IEEE Transactions on Magnetics
Abstract:This paper presents a novel bidirectional-driven microelectromechanical systems (MEMS) light manipulation stage. The designed device consists of two actuators integrated with a lens to act as both tracking (in-plane) and focusing (out-of-plane) components for optical pickup head. The actuator is driven by thermal, as well as magnetic, means. According to a static-load deflection test, this device ...
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