Abstract:The on-chip meta-lenses consisting of subwavelength slot arrays with lateral gradients have shown great potential for parallel signal processing and optical computing. The dynamic tuning mechanisms which are necessary steps toward exploiting the applications of the on-chip meta-system have been rarely mentioned yet. Here, a free-form functional microheater via topology design is proposed to manipulate the refractive index distribution, allowing for flexible optical wavefront shaping. For a proof-of-concept, wide range of dynamic focusing and beam steering are demonstrated via a tunable meta-lens on silicon photonic platform. The continuous scanning of the focused beam is experimentally achieved with a maximum travel range of 100 mu m in the longitudinal direction (approximate to 95 nm mW(-1)) and 25 mu m in the lateral direction (approximate to 20 nm mW(-1)). The thermal-optic tuning elements can response the electrical control within approximate to 41.2 mu s. A waveguide array at the focal plane is used to characterize the device. The on-chip loss of the tunable meta-lens is measured to be <1 dB including the coupling loss from slab to single-mode waveguide. The proposed tunable meta-lenses are fabricated via a standard silicon photonic process and allow for arbitrarily two dimensional (2D) beam steering. It offers great versatility for on-chip meta-systems with a wider scope of functionalities and applications.

Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer

Two-dimensional Silicon-on-glass Actuator Combined with a Dispensed Polymer Microlens

A two-dimensional silicon-on-glass actuator with dispensed polymer microlens

Development of Tracking and Focusing Micro Actuators for Dual-Stage Optical Pick-Up Head

In Situ Fabrication of a Tunable Microlens.

Integrated Bi-Directional Focusing and Tracking Actuators in a Monolithic Device for a MEMS Optical Pick-Up Head

Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup

Micro Lens Actuator And Polymer Objective Lens For Optical Pickup

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

A Micro-Focusing Stage Applied to Optical Pick-Up Head

Integrated Tracking and Focusing Systems of MEMS Optical Pickup Head

Monolithic Bi-directional Linear Microactuator for Light Beam Manipulation

Design and Research of the Point-Contact Optothermal Microactuator

A Silicon Integrated Micro Nano-Positioning Xy-Stage for Nano-Manipulation

FABRICATION AND INTEGRATION OF BINARY PHASED FRESNEL LENS AND MICRO LINEAR ACTUATOR FOR IR LASER BEAM SCANNING APPLICATION

Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication

Integrating positioning X-Y stage based on bulk micromachining

On-Chip Electrically Driven Tunable Meta-Lens for Dynamic Focusing and Beam Steering

On‐Chip Electrically Driven Tunable Meta‐Lens for Dynamic Focusing and Beam Steering

Wafer-scale fabricated thermo-pneumatically tunable microlenses