Abstract:This work investigates the design, fabrication, and characterization of a 3D nano‐printed bistable microlens actuator with magnetic actuation. Using two‐photon polymerization, the device monolithically integrates mechanical and optical components. The actuator offers significant microlens displacement relative to its footprint. Mechanical and optical characterization tests demonstrate its potential for endoscopic imaging applications, providing high‐resolution and extended depth of focus modes. The integration of multiple functional microscopy methods into a single, miniaturized instrument, known as multimodal endomicroscopy, presents significant challenges due to the often conflicting optical requirements of each imaging modality. In this study, the use of 3D nano‐printing based on two‐photon polymerization for the monolithic manufacturing of complete optical MEMS devices is investigated as an enabling platform for multimodal endoscopy. This approach offers unparalleled miniaturization, design flexibility, and alignment precision of micro‐optics and actuators. In particular, the design, fabrication, and characterization of a monolithically 3D nano‐printed bistable microlens actuator are discussed. Bistability allows the microlens to switch between two stable positions, thereby changing the focus distance and numerical aperture. The actuator features two coils with opposing current directions, which create a magnetic field gradient around a polymer micro‐magnet. This configuration allows for robust switching between stable positions with an average axial distance of 168.3 ± 7.3 μm. Experiments conducted to ascertain the optical characterization of the actuator demonstrate its capacity to transition between different optical modes. The beam widths are measured to be in the range of 4.1 ± 0.2 μm in the high‐resolution mode and 11.3 ± 1.1 μm in the extended depth of focus mode.

A two-dimensional silicon-on-glass actuator with dispensed polymer microlens

Two-dimensional Silicon-on-glass Actuator Combined with a Dispensed Polymer Microlens

Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup

Micro Lens Actuator And Polymer Objective Lens For Optical Pickup

Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer

In Situ Fabrication of a Tunable Microlens.

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Development of polymer MEMS process technology as an approach to a sustainable production system

Implementation of a micro ball lens on a silicon optical bench using insoluble two-phase liquid immersion technology

Microlens formation technology utilizing multi-phase liquid ambiance

Formation and Integration of a Ball Lens Utilizing Two Phase Liquid Technology

Realization of Three-Dimensionally MEMS Stacked Comb Structures for Microactuators Using Low-Temperature Multi-Wafer Bonding with Self-Alignment Techniques in CMOS-Compatible Processes

The implementation of concave micro optical devices using a polymer dispensing technique

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Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Splay Aligned Liquid Crystal Network Photoactuators for Integrated Microfluidic Pumps

Integrating SOI and poly-Si surface structures using a monolithic process