Research on Microelectron-Mechanical System and Its Application

Shi-xiang Jiang,Shi-qiang ZHU,Wen-sheng Huang

2001-01-01

Abstract:Theoretical and technical basis of MEMS are introduced.Future application of microelectron-machine to space,medicine,national defense and industries are listed in this paper.

What problem does this paper attempt to address?

The Conception of MEMS and Current Development at Home and Abroat

刘文耀,杜君文,应济

DOI: https://doi.org/10.3969/j.issn.1002-2333.2001.02.002

2001-01-01

Abstract:The principle and relevant technology of GEMS are introduced. The current development of this technology at home and abroad and the prospect are also involved.
Micro-dielectric-droplet impingement cooling system based on MEMS

ZHENG Ling-yun,YING Ji

2006-01-01

Abstract:Thermal management has emerged as a critical issue in the design of integrated circuits(ICs).As feature sizes and package densities increase,current package-level cooling techniques will soon become inadequate.MEMS-based principle of micro dielectric droplet impingement cooling system was introduecd in detail for removing heat from high-power IC chips.Relevant experiment platform was presented.
RESEARCH ON SEVERAL MECHANICAL PROBLEMS IN MICROELECTROMECHANICAL SYSTEMS

张向军,孟永钢,温诗铸

DOI: https://doi.org/10.3969/j.issn.1000-0879.2003.02.002

2003-01-01

Abstract:This paper reviews the state-of-the-art of researches on several solid mechanics problems in Micro-electromechanical Systems (MEMS), including the basic mechanical properties of materials, mechanical analysis of microstructures, failure analysis of microsystems and actuating mechanisms of microsystems. Different kinds of acting forces, multi-factor interactions, multi-disciplinary nature and non-linearity due to the scaling effect and surface effect are emphasized, and the future work in this field is suggested.
Microelectromechanical System Technology and Its Application

张海涛,张斌

DOI: https://doi.org/10.3969/j.issn.1001-2028.2002.04.010

2002-01-01

Abstract:Microelectromechanical system (MEMS) technology makes it possible the moralization and integration of the products based on the material of silicon. This technology is divided into four categories: body, surface, metal and compound micromechanical processes. The basic technologies included in the micromechanical system are erosion, si-bond, multiplayer film sediment without stress, sacrifice layer, LIGA and the combined technologies based on them. The applications of micro-sensors, micro-machines, mechanism filter and resonant filters are presented, and the further development of technology is discussed.
A Review and Prospect of Power MEMS

甘霖,李伟,杨灿军,刘宜胜,宋瑞银,黎嘉杰

DOI: https://doi.org/10.3969/j.issn.1001-3881.2004.09.002

2004-01-01

Abstract:The research status of micro power source technology was introduced,the key technology of power MEMS was analyzed,and the future development was discussed.
Medical Applications of MEMS

汤扬华,叶雄英,周兆英

DOI: https://doi.org/10.3321/j.issn:1004-132x.2001.02.032

2001-01-01

Abstract:MEMS (micro electro mechanical system) is a new field which has alot of advantages: small volume, light weight, low energy consumption,fast response, big batch and low cost etc. MEMS shows huge market potentials because of the prospect of applications in many fields such as industry, agriculture,medicine, communication and military. It will obtain the unreplaceable position in medicine. In this paper, an overview of applications of MEMS in medicine is given with an introduction to MEMS.
Future of Microelectromechanical Systems (Mems)

MH Bao,WY Wang

DOI: https://doi.org/10.1016/0924-4247(96)01274-5

1996-01-01

Abstract:The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is unrealistic to consider micromachining technology as a micro version of conventional machining technology. As a matter of fact, micromachining technology stemmed from the planar technology of silicon and is basically a two-dimensional processing technology. On the other hand, it is obvious that a micromachine cannot compare with a conventional machine in strength and power. For the successful development of MEMS in the future, a simple rule is suggested by the experience gained in the past few years: try to avoid as much as possible mechanical coupling with the outside world while trying hard to improve the MEMS technology to enhance the mechanical power of the devices. In addition to that, the strategy proven to be correct for the development of solid-state sensors also applies: MEMS devices should mainly be developed for new applications with a vast market. Their substitution for traditional applications should not be considered as a main strategy of development. Based on these arguments, the future development of MEMS devices and technologies is further discussed in the paper.
Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

李志宏

DOI: https://doi.org/10.1360/112012-508

2012-01-01

Scientia Sinica Informationis

Abstract:The micro-nanoelectromechanical systems (MEMS/NEMS, herein called MEMS for simplicity), which the originate from microelectronics technology, can deal with the thermal, optical, magnetic, chemical, and biological variables. Various structures and devices can be fabricated on a chip through the integration technology. In the last few decades, MEMS has played increasingly important roles in aerospace, military, optical communication, wireless communication, biomedicine, etc., and MEMS products have been widely used in our daily lives. Due to the highly multidisciplinary nature, MEMS shows a diverse research and development trend. This report will discuss the status and trend of the development of MEMS fundamental research. The discussion will focus on the fusion of MEMS technology with integrated circuits, nanotechnology, and modern biotechnology. The strong intervention of the TSMC, the largest IC foundry in the world, in MEMS foundry industry greatly accelerates the pace of integration of MEMS and IC. More and more new nano-materials and nanofabrication technologies have been applied in MEMS technology to promote the performance and the emergence of new devices. On the other hand, NEMS technology provides new nanoscale three-dimensional processing approaches for novel CMOS devices, and spawns new types of IC devices, such as NEMS relays and nano-mechanical memories. The combination with the biotechnology becomes a new growth point of MEMS, where the exible electrode and circuit is one of the typical representatives.
The application of micro field theory to MEMS actuators

Tianhong Cui,Zhaoying Zhou

1996-01-01

Abstract:This paper presents a new basic concept which is the theory of micro field effect to analyze the actuation mechanism of MEMS(Micro Electro Mechanical Systems) actuators. First, the basic concept and fundamental principle of micro field have been put forward. Then, the micro field effect has been used to analyze the intrinsic quality of two kinds of microactuators, which include an electrohydrodynamic (EHD) micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments. The basic principle of micro field effect has been tested and verified.
MEMS Technology Status and Development Prospects

G. Yu.

Abstract:The development status,processing technologies and product markets of Micro Electro Mechanical Systems(MEMS) technology are introduced.The packaging technology and existing problems of MEMS product are mainly discussed,combining the MEMS materials and processing techniques,and the development prospects of MEMS technology are prospected.

Engineering,Materials Science
MEMS vacuum packaging technology and applications

Jin, Y.,Wang, Z.F.,Lim, P.C.,Pan, D.Y.,jun wei,c k wong

DOI: https://doi.org/10.1109/EPTC.2003.1271534

2003-01-01

Abstract:Vacuum packaging is essential for various kinds of microelectromechanical system (MEMS) devices for enhancing the performance and reliability. This paper presents our works on research on vacuum packaging of MEMS devices. A hermetical sealing technique has been developed, which involves the processes of anodic bonding for silicon and glass wafers with imperfect interface, adhesive bonding, glass frit bonding and silicon-to-gold eutectic bonding. Vacuum maintenance has been achieved by applying evaporable and nonevaporable getter films in the packaging process. A specific helium leak detector with bombing system is introduced, which can monitor the deformation of micro diaphragms and conduct leak detection for MEMS structures.
Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

Zhuoyue Zheng,Chen Wang,Linlin Wang,Zeyu Ji,Xiaoxiao Song,Pui-In Mak,Huafeng Liu,Yuan Wang

DOI: https://doi.org/10.3390/mi15030352

IF: 3.4

2024-03-01

Micromachines

Abstract:The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Application and Development of Microelectronic Technology in Biology and Medicine

谢翔,张春,王志华

DOI: https://doi.org/10.3969/j.issn.1007-0249.2003.02.018

2003-01-01

Abstract:In the developing process, research on microelectronic technology and biology and medicine are always mutually stimulated. Based on the basic concept and the survey of current research situation, the interaction between two fields and the development in the biomedical electronics, such as biomedical sensor, nerve electrode, implantable electronic device, monitoring technology, biochip, molecule and biomolecular electronics and bionic device are reviewed. Up-to-date methodology is discussed and the developing trend of research is prospected.
Microelectromechanical systems (MEMS): fabrication, design and applications

Jack W Judy

DOI: https://doi.org/10.1088/0964-1726/10/6/301

IF: 4.1

2001-11-28

Smart Materials and Structures

Abstract:Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms can be used to convert real-world signals from one form of energy to another, thereby enabling many different microsensors, microactuators and microsystems. Despite only partial standardization and a maturing MEMS CAD technology foundation, complex and sophisticated MEMS are being produced. The integration of ICs with MEMS can improve performance, but at the price of higher development costs, greater complexity and a longer development time. A growing appreciation for the potential impact of MEMS has prompted many efforts to commercialize a wide variety of novel MEMS products. In addition, MEMS are well suited for the needs of space exploration and thus will play an increasingly large role in future missions to the space station, Mars and beyond.

materials science, multidisciplinary,instruments & instrumentation
APPLICATION OF MICRO-MOIRE TECHNIQUE TO MECHANICS MEASUREMENT FOR MICRO-ELECTRONIC DEVICES

XIE Huimin,WANG Huaixi,Ma Shaopeng,Liu Qingjun,Satoshi Kishimoto

2009-01-01

Abstract:The micro-miniature of electronic devices is greatly promoted by the rapid development of electronics industry.The study on the reliability of the micro-electronic devices is the foundation of designing novel electronic products,and has drawn much attention of researchers.The parameters of mechanical behavior obtained from experiment are the basis of reliability analysis.In this study,the development of micro-moiremethods is reviewed,covering moire interferometry,scanning electronic microscope moiremethods and their applications to analysis of mechanical behavior of the micro-electronic devices are discussed.
MEMS Technology: A Review

Manish Kumar Mishra,Vikas Dubey,P. M. Mishra,Isharat Khan

DOI: https://doi.org/10.9734/jerr/2019/v4i116891

2019-02-18

Journal of Engineering Research and Reports

Abstract:This review article through light on a highly promising & demanding technology, which is set to revolutionize nearly every product category in present era, while discussing the Concept, Design & Development, Fabrication techniques and applications of micro electro-mechanical systems (MEMS) based Devices or systems. Microelectromechanical system discloses outstanding flexibility and adaptability in miniaturization devices followed by their compact dimension, low power consumption, and fine performance. The MEMS devices have numerous and very high potentials of creating a new field of applications for mobile equipment’s with increased flexibility & more reliability. This work deals with research carried out for the development of MEMS based sensors & Actuators and appropriate uses of MEMS. This work carries information’s regarding subsequent commercial and real life applications of MEMS and discusses various recent technological innovations carried out with their advantages & disadvantages. This work also describes the historical development of micro-electromechanical system (MEMS) sensor technology.
Inspiration on Development and Industrialization of Micro/Nano Science and Technology

DING Heng-gao,ZHU Rong

DOI: https://doi.org/10.3969/j.issn.1672-6030.2007.04.001

2007-01-01

Abstract:With development of mico/nano science and technology, great progresses are made in industrialization as well.Some viewpoints were presented in this paper according to Chinese current status and trend in development: motivate studies on innovative fabrication and design to enhance our capability on application and industrialization of micro-electro-mechanical system(MEMS);motivate fundamental research for improving the level of component and system of MEMS;motivate the integration of micro/nano science and technology.Finally,some advice were given for the future works.
Summary of Research Status and Application of MEMS Accelerometers

Shijiazhuang

DOI: https://doi.org/10.4236/JCC.2018.612021

2018-12-12

Abstract:The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.

Materials Science,Engineering,Chemistry
Materials issues in microelectromechanical systems (MEMS)

S.M Spearing

DOI: https://doi.org/10.1016/s1359-6454(99)00294-3

IF: 9.4

2000-01-01

Acta Materialia

Abstract:Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales. Examples include pressure sensors, accelerometers, gyroscopes and optical devices, as well as chemical, biomedical and fluidic applications. The status of MEMS technology is reviewed with particular emphasis on materials issues therein. The materials issues in MEMS are divided into three categories, the MEMS material set, microfabrication processes, and material characterization and design. Each of these areas is addressed, with particular emphasis on the potential impact of materials solutions. A discussion of the future of MEMS and the role of materials in that future is given.

materials science, multidisciplinary,metallurgy & metallurgical engineering
MEMS Based Micro Displacement Sensor and Its Application

SUN Fengming,FU Xing,ZHU Zhenyu,GAO Sai,ZHANG Chao

DOI: https://doi.org/10.3969/j.issn.1004-1699.2013.02.028

2013-01-01

Abstract:A micro displacement sensor based on MEMS(Micro-Electro-Mechanical System)technology was developed for the micro-nano dimensional measurement as a SPM(Scanning Probe Microscopy)head.This kind of electrostatic comb-drive structure consists of two interdigitated finger structures.One kind of fingers is fixed and the other is movable.A main shaft connected with the movable comb structures senses the surface displacement,which could generate a capacitance variation between the fixed and movable fingers.A signal detection circuit was conceived to convert the capacitance variation to the voltage variation.An experiment system was constructed.Approach test was carried out to calibrate the sensitivity of the head as 0.43 mV/nm.Experiment results indicate that the non-linearity error of the SPM head is less than 0.22%.The z axis measurement range of the SPM head is 10 μm.An SPM system including the SPM head is constructed to measure a grating structure in which step height is 108 nm.

Research on Microelectron-Mechanical System and Its Application

The Conception of MEMS and Current Development at Home and Abroat

Micro-dielectric-droplet impingement cooling system based on MEMS

RESEARCH ON SEVERAL MECHANICAL PROBLEMS IN MICROELECTROMECHANICAL SYSTEMS

Microelectromechanical System Technology and Its Application

A Review and Prospect of Power MEMS

Medical Applications of MEMS

Future of Microelectromechanical Systems (Mems)

Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

The application of micro field theory to MEMS actuators

MEMS Technology Status and Development Prospects

MEMS vacuum packaging technology and applications

Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

Application and Development of Microelectronic Technology in Biology and Medicine

Microelectromechanical systems (MEMS): fabrication, design and applications

APPLICATION OF MICRO-MOIRE TECHNIQUE TO MECHANICS MEASUREMENT FOR MICRO-ELECTRONIC DEVICES

MEMS Technology: A Review

Inspiration on Development and Industrialization of Micro/Nano Science and Technology

Summary of Research Status and Application of MEMS Accelerometers

Materials issues in microelectromechanical systems (MEMS)

MEMS Based Micro Displacement Sensor and Its Application