Inspiration on Development and Industrialization of Micro/Nano Science and Technology

DING Heng-gao,ZHU Rong
DOI: https://doi.org/10.3969/j.issn.1672-6030.2007.04.001
2007-01-01
Abstract:With development of mico/nano science and technology, great progresses are made in industrialization as well.Some viewpoints were presented in this paper according to Chinese current status and trend in development: motivate studies on innovative fabrication and design to enhance our capability on application and industrialization of micro-electro-mechanical system(MEMS);motivate fundamental research for improving the level of component and system of MEMS;motivate the integration of micro/nano science and technology.Finally,some advice were given for the future works.
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