Abstract:The carbon-based micro/nano electromechanical system (MEMS/NEMS) technique provides a powerful approach to large-scale manufacture of high-aspect-ratio carbon structures for wafer-level processing. The fabricated three-dimensional (3D) carbon structures have the advantages of excellent electrical and electrochemical properties, and superior biocompatibility. In order to improve their performance for applications in micro energy storage devices and microsensors, an increase in the footprint surface area is of great importance. Various approaches have been proposed for fabricating large surface area carbon-based structures, including the integration of nanostructures such as carbon nanotubes (CNTs), graphene, nanowires, nanofilms and nanowrinkles onto 3D structures, which has been proved to be effective and productive. Moreover, by etching the 3D photoresist microstructures through oxygen plasma or modifying the photoresist with specific materials which can be etched in the following pyrolysis process, micro/nano hierarchical carbon structures have been fabricated. These improved structures show excellent performance in various applications, especially in the fields of biological sensors, surface-enhanced Raman scattering, and energy storage devices such as micro-supercapacitors and fuel cells. With the rapid development of microelectronic devices, the carbon-based MEMS/NEMS technique could make more aggressive moves into microelectronics, sensors, miniaturized power systems, etc. In this review, the recent advances in the fabrication of micro/nano hierarchical carbon-based structures are introduced and the technical challenges and future outlook of the carbon-based MEMS/NEMS techniques are also analyzed.

Research on Carbon Nanotubes in Micro Electro-mechanical System and Its Application

Research on Microelectron-Mechanical System and Its Application

Study on Application of Carbon Nanotubes in Micro-electrodes for MEMS

Recent Progress of Nano-Electromagnetic Compatibility (Nano-Emc) in the Emerging Carbon Nanoelectronics

The Application of Carbon Nanotubes in Biosensor

New Development in the Synthesis of Single-Walled Carbon Nanotubes

Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

Experiments on Micro-nano Units Based on Carbon Nanotube

Nanoelectromechanical Switches with Vertically Aligned Carbon Nanotubes

Microelectromechanical System Technology and Its Application

Carbon Nanotubes And Their Potential Field Emission Applications

Multilevel, Multicomponent Microarchitectures of Vertically-Aligned Carbon Nanotubes for Diverse Applications

Research Progress on the Preparation and Application of Carbon Nanotubes

Review on Carbon-Based Micro and Nano Electro-Mechanical Systems for Biotechnological Application

Properties and nanotechnological applications of nanotubes

Synthesis and Application of Carbon Nanotubes

The State-of-the-Art of Micro Electro Mechanical Systems

The Application of Carbon Nanotubes in CMOS Integrated Circuits

Medical Applications of MEMS

A Review on Vibration Characteristics of Carbon Nanotubes and Its Application Via Vacuum.