Experiments on Micro-nano Units Based on Carbon Nanotube

Yong-qing JIANG,Ying WU,Yi XIANG,Zhao-ying ZHOU,Xing YANG,Di XU,Zhe-jia FANG
DOI: https://doi.org/10.16818/j.issn1001-5868.2009.01.014
2009-01-01
Abstract:Based on the growing technology and microfabrication techniques of carbon nanotube, the experiments of micro-nano unit based on carbon nanotube were finished and its fabrication processes were developed. The results show that the micro-nano unit with ohm contact or skotoky contact can be fabricated by 'electrodes on tube process' or 'tube on electrodes process'. 'Tube on electrodes process' has advantages of simple process, low cost, etc, which can provide new ideas for the integration fabrication of micro-nano unit based on carbon nanotube.
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