Integrating Vertically Aligned Carbon Nanotubes on Micromechanical Structures

WH Teh,CG Smith,KBK Teo,RG Lacerda,GAJ Amaratunga,WI Milne,M Castignolles,A Loiseau
DOI: https://doi.org/10.1116/1.1591743
2003-01-01
Abstract:We present preliminary results on a microfabrication approach to enable the integration of high yield, uniform, and preferential growth of vertically aligned carbon nanotubes (VACNTs) on low-stress micromechanical structures using a combination of “electron-beam crosslinked” poly(methylmethacrylate) surface nanomachining and direct current plasma enhanced chemical vapor deposition of electric-field-aligned carbon nanotubes. In this article, selective placement of high yield and uniform VACNTs on a partially suspended Ni/SiO2/Ti microstructure has been demonstrated.
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