Uniform Patterned Synthesis of Vertically-Aligned Carbon Nanotubes on Low-Stress Micromechanical Structures

WH Teh,CG Smith,KBK Teo,RG Lacerda,GAJ Amaratunga,WI Milne,M Castignolles,A Loiseau
DOI: https://doi.org/10.1109/sensor.2003.1215285
2003-01-01
Abstract:We report a simple methodology to enable the integration of high yield, uniform and preferential growth of vertically-aligned carbon nanotubes (VACNTs) on micromechanical and nanomechanical structures. This technique uses a combination of 'electron beam crosslinked' polymethylmethacrylate (PMMA) surface nanomachining and direct current plasma enhanced chemical vapor deposition (dc-PECVD) of carbon nanotubes.
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