The Conception of MEMS and Current Development at Home and Abroat

刘文耀,杜君文,应济

DOI: https://doi.org/10.3969/j.issn.1002-2333.2001.02.002

2001-01-01

Abstract:The principle and relevant technology of GEMS are introduced. The current development of this technology at home and abroad and the prospect are also involved.

What problem does this paper attempt to address?

Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

林谢昭,应济

DOI: https://doi.org/10.3969/j.issn.1000-9787.2008.04.003

2008-01-01

Abstract:The key of commercial successes of MEMS rests with computer aided methodology in the field of MEMS design and manufacture.The reason that causes MEMS design complexity and hardship is discussed.The hierarchy of MEMS CAD is introduced.The state of research in MEMS macro-modeling approaches at home and abroad are also introduced and summed up.The emphases are aimed at the MEMS devices compact-modeling(order-reduced modeling) methods and the macro-model's representation.The two keystones in the nonlinear macro-modeling are the representation of the original system's nonlinear characteristics and the realization of automatic model reduction.Some suggestions for the further researches are proposed
Micro-dielectric-droplet impingement cooling system based on MEMS

ZHENG Ling-yun,YING Ji

2006-01-01

Abstract:Thermal management has emerged as a critical issue in the design of integrated circuits(ICs).As feature sizes and package densities increase,current package-level cooling techniques will soon become inadequate.MEMS-based principle of micro dielectric droplet impingement cooling system was introduecd in detail for removing heat from high-power IC chips.Relevant experiment platform was presented.
A Review and Prospect of Power MEMS

甘霖,李伟,杨灿军,刘宜胜,宋瑞银,黎嘉杰

DOI: https://doi.org/10.3969/j.issn.1001-3881.2004.09.002

2004-01-01

Abstract:The research status of micro power source technology was introduced,the key technology of power MEMS was analyzed,and the future development was discussed.
Research on Microelectron-Mechanical System and Its Application

Shi-xiang Jiang,Shi-qiang ZHU,Wen-sheng Huang

2001-01-01

Abstract:Theoretical and technical basis of MEMS are introduced.Future application of microelectron-machine to space,medicine,national defense and industries are listed in this paper.
Research Progress of the Cell-Impedance Sensor Based on MEMS Technique

XU Ying,YANG Yong,WANG Ping

DOI: https://doi.org/10.3760/cma.j.issn.1673-4181.2008.03.005

2008-01-01

Abstract:The cell-impedance substrate sensor,which is mainly used to detect the shapes and function of cells and other micro.organism.is a novel tool based on the technique of BIOMEMS to study the cellular physiology and clinical Dharmasology.It has drawn attention from both domestic and international scholars as well as compa nies in recent years for its advantages such as innovative design and long-term non-invasive monitoring.This paper introduces the interfacial model of cell-sensor in detail and gives a sketch of the recent international research progress.Then the novel interdigitated array,which was designed in our group recently,is introduced.The fore ground of development is discussed in the end.
Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

李志宏

DOI: https://doi.org/10.1360/112012-508

2012-01-01

Scientia Sinica Informationis

Abstract:The micro-nanoelectromechanical systems (MEMS/NEMS, herein called MEMS for simplicity), which the originate from microelectronics technology, can deal with the thermal, optical, magnetic, chemical, and biological variables. Various structures and devices can be fabricated on a chip through the integration technology. In the last few decades, MEMS has played increasingly important roles in aerospace, military, optical communication, wireless communication, biomedicine, etc., and MEMS products have been widely used in our daily lives. Due to the highly multidisciplinary nature, MEMS shows a diverse research and development trend. This report will discuss the status and trend of the development of MEMS fundamental research. The discussion will focus on the fusion of MEMS technology with integrated circuits, nanotechnology, and modern biotechnology. The strong intervention of the TSMC, the largest IC foundry in the world, in MEMS foundry industry greatly accelerates the pace of integration of MEMS and IC. More and more new nano-materials and nanofabrication technologies have been applied in MEMS technology to promote the performance and the emergence of new devices. On the other hand, NEMS technology provides new nanoscale three-dimensional processing approaches for novel CMOS devices, and spawns new types of IC devices, such as NEMS relays and nano-mechanical memories. The combination with the biotechnology becomes a new growth point of MEMS, where the exible electrode and circuit is one of the typical representatives.
Microelectromechanical System Technology and Its Application

张海涛,张斌

DOI: https://doi.org/10.3969/j.issn.1001-2028.2002.04.010

2002-01-01

Abstract:Microelectromechanical system (MEMS) technology makes it possible the moralization and integration of the products based on the material of silicon. This technology is divided into four categories: body, surface, metal and compound micromechanical processes. The basic technologies included in the micromechanical system are erosion, si-bond, multiplayer film sediment without stress, sacrifice layer, LIGA and the combined technologies based on them. The applications of micro-sensors, micro-machines, mechanism filter and resonant filters are presented, and the further development of technology is discussed.
Study on Display Design of MEMS-CAD

俞武嘉,李建华,傅建中,陈子辰

DOI: https://doi.org/10.3969/j.issn.1001-4551.2001.05.027

2001-01-01

Abstract:In this paper, the feature of MEMS-CAD is introduced at first. And then, the display design method of MEMS-CAD is discussed in detail. Later, we make a study of how to fulfil the display design of MEMS-CAD System, which based on Windows?platform of PC.
MEMS Technology Status and Development Prospects

G. Yu.

Abstract:The development status,processing technologies and product markets of Micro Electro Mechanical Systems(MEMS) technology are introduced.The packaging technology and existing problems of MEMS product are mainly discussed,combining the MEMS materials and processing techniques,and the development prospects of MEMS technology are prospected.

Engineering,Materials Science
TECHNOLOGY OF SILICON-BASED MEMS

郝一龙,张大成,李婷

DOI: https://doi.org/10.3969/j.issn.1671-7449.2002.z2.032

2001-01-01

Abstract:Concerning the development history of MEMS technology, the present paper introduces a state of the art developing direction of silicon based MEMS machining, indicating that there are two main developing directions. One is sacrificial layers technology, and the other is bulk micromachining. Sacrificial layers technology is developing towards multiple layers and integration. Bulk micromachining mainly includes combination of bonding and deep etching, pursuit to big mass and small stress, and three dimensional fabrications technology which is the developing direction of new body silicon technology. Standard process fabrication is becoming more and more important for MEMS study.
Future of Microelectromechanical Systems (Mems)

MH Bao,WY Wang

DOI: https://doi.org/10.1016/0924-4247(96)01274-5

1996-01-01

Abstract:The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is unrealistic to consider micromachining technology as a micro version of conventional machining technology. As a matter of fact, micromachining technology stemmed from the planar technology of silicon and is basically a two-dimensional processing technology. On the other hand, it is obvious that a micromachine cannot compare with a conventional machine in strength and power. For the successful development of MEMS in the future, a simple rule is suggested by the experience gained in the past few years: try to avoid as much as possible mechanical coupling with the outside world while trying hard to improve the MEMS technology to enhance the mechanical power of the devices. In addition to that, the strategy proven to be correct for the development of solid-state sensors also applies: MEMS devices should mainly be developed for new applications with a vast market. Their substitution for traditional applications should not be considered as a main strategy of development. Based on these arguments, the future development of MEMS devices and technologies is further discussed in the paper.
Progress on Micro Cantilever Resonant Gas Sensors

高伟,董瑛,尤政

DOI: https://doi.org/10.3969/j.issn.1000-9787.2008.11.001

2008-01-01

Abstract:Micro mechanical resonant sensor is a research focus in MEMS field.The theoretical basis of micro cantilever resonant gas sensor is discussed and the key technologies and general methods of cantilever surface functionalization are introduced.The research status of micro cantilever resonant gas sensor and the research progress in the latest five years are provided.The future development trend and application prospect are forecasted.
Microelectromechanical systems (MEMS): fabrication, design and applications

Jack W Judy

DOI: https://doi.org/10.1088/0964-1726/10/6/301

IF: 4.1

2001-11-28

Smart Materials and Structures

Abstract:Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms can be used to convert real-world signals from one form of energy to another, thereby enabling many different microsensors, microactuators and microsystems. Despite only partial standardization and a maturing MEMS CAD technology foundation, complex and sophisticated MEMS are being produced. The integration of ICs with MEMS can improve performance, but at the price of higher development costs, greater complexity and a longer development time. A growing appreciation for the potential impact of MEMS has prompted many efforts to commercialize a wide variety of novel MEMS products. In addition, MEMS are well suited for the needs of space exploration and thus will play an increasingly large role in future missions to the space station, Mars and beyond.

materials science, multidisciplinary,instruments & instrumentation
Gas Sensor Based on MEMS Technology

李珂,于世洁,尤政,赵嘉昊

DOI: https://doi.org/10.3969/j.issn.1000-9787.2008.11.002

2008-01-01

Abstract:The principles of gas sensors based on MEMS technology at home and abroad are summarized,which include resonate micro cantilever,SAW,conductor detect,photoacoustic spectroscopy,gas spectrum,catalytic combustion and FAIMS.The characteristics of all kinds of sensor are compared.
MEMS Developments in Tsinghua University

LT Liu,ZJ Li

DOI: https://doi.org/10.1109/icsict.1998.786495

1998-01-01

Abstract:This article introduces MEMS development in the Institute of Microelectronic at Tsinghua University. Several MEMS devices: smart sensors, micromotors, micropump and microphone are described
Structural Element Library Based Conceptual Design Methodology of MEMS

Ma Binghe,Wang Hui,Yuan Weizheng

2010-01-01

Abstract:A new methodology for MEMS conceptual design was introduced to assist the initial stages of design exploration.The methodology utilized past successful MEMS designs and sub-assemblies as building blocks stored in an indexed library. During conceptual design for exploring new MEMS configurations, interrelated elements can be retrieved automatically from the library by behavior matching, and then elements' function and structure of components and the device can be further considered and determined by the designers. Design of shear stress sensor was taken as an example to successfully testify the ability to obtain new designs with high efficiency.
Trends and frontiers of MEMS

Wen H. Ko

DOI: https://doi.org/10.1016/j.sna.2007.02.001

2007-05-01

Abstract:Since 1988, the MEMS has advanced from the early stage of technology development, device exploration, and laboratory research, to the mature stage of mass production and applications, as well as launched exploration and research in many new areas. For the trends of MEMS in the next 5–10 years, people with different background would have different views and projections. This article will present examples to illustrate the suggested future trends, as some of us see it.From the present MEMS orientation, the future trends of MEMS can be suggested as below:1.Transfer the traditional useful MEMS to large scale applications, to establish mass markets. This would build up MEMS industries to support the sustained MEMS research and development. There are two major directions: (A) Reduce cost, raise yield and efficiency to cultivate mass markets. (B) Raise system performance to meet the special needs.2.MEMS network. There are needs of having many different functional systems and many similar functional systems working together to perform required big tasks.3.New materials. Besides silicon and semiconductors, many other materials can be used for MEMS.4.Explore new frontiers. Many new Frontiers of research and application were developing. More will be open up. Such as: (A) biological research and medical instruments; (B) micro-energy sources—micro-fuel cells, environmental energy converters, remote energy supply techniques, etc.; (C) radio frequency and optical/IFR communication; (D) environmental monitoring, and protection; (E) ocean and water-way studies; (F) nano-micro-mixed technology.This article attempts to present the views of some MEMS educators and researchers in an over simplified form. It is hoping that this would stimulate more valuable discussions that may be valuable to planners of MEMS development and general readers.
Application of MEMS in Inertial Measurement

李志信,罗小兵,过增元

DOI: https://doi.org/10.3969/j.issn.1000-9787.2001.07.019

2001-01-01

Abstract:Application status of MEMS in inertial measurement is summarized, the basic principles of accelerometers and gyroscopes and their commercialization situation are briefly introduced, some ideas about development of micromachined inertial sensor in China are presented.
COMPUTER-AIDED DESIGN AND SIMULATION FOR MEMS DEVICES

孙克豪,钱劲,张立宪,余同希,赵亚溥

DOI: https://doi.org/10.3321/j.issn:1001-9669.2001.04.020

2001-01-01

Abstract:The Computer Aided Design (CAD) and simulation of micro electro mechanical systems is summarized and the primary contents and key problems with the MEMS simulation are also discussed. Various simulating systems are classified according their construction and application range. Combined with the instances of electrostatic micromotor and micro/nano tweezers, the modularized structure of CAD system as well as the establishment and linking with CAD system of the material database of MEMS is analyzed. The presented approach can be extended to the design and simulation of microsensors and microactuators.
Summary of Research Status and Application of MEMS Accelerometers

Shijiazhuang

DOI: https://doi.org/10.4236/JCC.2018.612021

2018-12-12

Abstract:The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.

Materials Science,Engineering,Chemistry

The Conception of MEMS and Current Development at Home and Abroat

Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

Micro-dielectric-droplet impingement cooling system based on MEMS

A Review and Prospect of Power MEMS

Research on Microelectron-Mechanical System and Its Application

Research Progress of the Cell-Impedance Sensor Based on MEMS Technique

Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

Microelectromechanical System Technology and Its Application

Study on Display Design of MEMS-CAD

MEMS Technology Status and Development Prospects

TECHNOLOGY OF SILICON-BASED MEMS

Future of Microelectromechanical Systems (Mems)

Progress on Micro Cantilever Resonant Gas Sensors

Microelectromechanical systems (MEMS): fabrication, design and applications

Gas Sensor Based on MEMS Technology

MEMS Developments in Tsinghua University

Structural Element Library Based Conceptual Design Methodology of MEMS

Trends and frontiers of MEMS

Application of MEMS in Inertial Measurement

COMPUTER-AIDED DESIGN AND SIMULATION FOR MEMS DEVICES

Summary of Research Status and Application of MEMS Accelerometers