Abstract:¶ Corresponding authors Advances in the field of micro/nano-electro-mechanical systems (MEMS and NEMS) now offer unique opportunities in the design of small and ultrasensitive analytical methods. MEMs/NEMs have demonstrated their unique advantages when they are combined with chemistry and biology, including fast, real-time responses. In addition, MEMs and NEMS are small enough to be integrated into other devices. One of the most promising MEMs is microcantilevers, which have been proven to be an outstanding transducer for chemical and biological sensors. This review summarizes the receptors and immobilization approaches reported for nanomechanical sensors and interpret the mechanism and dynamic relationship of recognition induced nanomechanical motions. Since the three pioneer papers (1-3) published in 1994, the micro/nanocantilever sensor technology had boomed and become a promising sensor technology. Microcantilever sensors have several advantages over many other sensor technologies, including faster response time, lower cost of fabrication, the possibility of sensor arrays with small overall dimensions, the ability to explore microenvironments, and improved portability for field applications. SEM pictures of microcantilevers are shown in Fig. (1). Microcantilevers are miniature diving boards that are micromachined from silicon or other materials. The length of these cantilevers is often in the range of 100-200 microns while the thickness ranges from 200 -1000 nm; Recent advances in micromachining cantilever beams that can detect extremely small forces and mechanical stresses promise to bring about a revolution in the field of chemical, physical, and biological sensor development.

Progress on Micro Cantilever Resonant Gas Sensors

Gas Sensor Based on MEMS Technology

The Optimal Design and Application QCM Gas Sensor

Chemical Specificity in Nanomechanical Sensors

A Smart Resonating Micro-Cantilever in MEMS Gas Sensor: Improved Design

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Thermally-Excited MEMS Cantilever Resonator for Gas Sensing

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Study on Micropressure Sensors of Cantilever Beam Circular Resonant Cavity

Electrothermal Driving Microcantilever Resonator As a Platform for Chemical Gas Sensing

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Trace Gas Sensor Based on Mems Cantilever Resonator

Microcantilever Sensor for the Detection Ofvolatile Organic Compounds

Improvement of a Micro-Beam in a Smart Gas Sensor with Resonating Mechanism

The Recent Progress of MEMS/NEMS Resonators

Direct Bonding SOI Wafer Based MEMS Cantilever Resonator for Trace Gas Sensor Applicaiton

MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA

A Smart Wide Range Resonance Gas Sensor with a Multi-Mode Single-Port Micro-Cantilever

Development of Microcantilever-Based Chemical and Biological Sensors

Self-Excited Piezoelectric Microcantilever For Gas Detection

Advances in sensing mechanisms and micro/nanostructured sensing layers for surface acoustic wave-based gas sensors