Microcantilever Sensor for the Detection Ofvolatile Organic Compounds

董瑛,高伟,郑义,尤政
DOI: https://doi.org/10.3969/j.issn.1672-6030.2010.02.001
2010-01-01
Nanotechnology and Precision Engineering
Abstract:Based on a thermal driving microcantilever resonator that has been developed for gas sensing application,a resonant gas sensor consisting of the microcantilever resonator coated with polymer as the sorbent layer for the detection of volatile organic compounds(VOCs)was presented.Three types of polymers,polyethyleneoxide(PEO),polyvinylalcohol(PVA)and polyethylenevinylacetate(PEVA)were used to detect six types of VOCs,toluene,benzene,ethanol,acetone,hexane and octane.The operation temperature of the polymer layer was estimated through finite element analysis.PVA and PEVA coatings were prepared through a spray method and PEO coating was prepared through a dropping method.The open-loop amplitude-frequency characteristic of the sensor was measured.Moreover,the dependence of the frequency shift of the sensors on the vapor concentration of the analytes,and the response of the sensors to relative humidity were tested;meanwhile,the sensitivity and linearity of the sensors were analyzed.The experimental results provide confirmation that the polymer-coated thermal driving microcantilever resonator is an excellent platform for VOCs detection.According to the experimental results,sensitive and miniature gas sensors based on the microcantilever resonator with different polymers can be proposed.
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