Investigation of Gas Microsensors Array Based on Polymer-Carbon Black Sensitive Film

SUN Xiao-xiang,XIE Hai-fen,YANG Qiu-dong,HUANG Yi-ping
DOI: https://doi.org/10.3969/j.issn.1000-9787.2005.03.007
2005-01-01
Abstract:A novel chemical gas sensor that utilizes polymer-carbon black composition as sensitive film is studied.With the deposition of four organic gas sensitive composite polymer films which are poly(4-vinyl phenol),poly(ethylene oxide),poly(caprolactone)and poly(ethylene-co-vinyl acetate) on the interdigitated microelectrodes,four polymer-carbon black chemiresistive gas microsensors are fabricated.The resistance changes of sensors to four organic gases (i.e.acetone,ethanol,methanol and toluene) at 5×10~(-4) volume fraction are examined.The response (ΔR/R) of microsensors is from 1.9% to 0.01% and the configuration of interdigitated microelectrodes is suitable for low volume fraction.By principal component analysis of responses of microsensors,it is clear that four kinds of different organic gases can be completely discriminated.
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